• 5852 Citations
  • 43 h-Index
1987 …2019
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Research Output 1987 2019

  • 5852 Citations
  • 43 h-Index
  • 217 Article
  • 5 Conference contribution
  • 1 Chapter
  • 1 Review article
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Review article
2017

Fabrication method for nanocluster superatoms with high-power impulse magnetron sputtering

Tsunoyama, H., Tona, M., Tsukamoto, K. & Nakajima, A., 2017, In : Journal of the Vacuum Society of Japan. 60, 9, p. 352-361 10 p.

Research output: Contribution to journalReview article

Nanoclusters
nanoclusters
Magnetron sputtering
impulses
magnetron sputtering