In the past, D/F characteristics, load-deformation relationships until the materials are fractured, have been analyzed on the suiface. The D/F characteristics are affected by more than ten thousand micro-scale internal structures like air bubbles (pores), cracks and particles; therefore, it is required to analyze nano-scale D/F characteristics inside materials. In this paper, we propose a method that automatically obtains the corresponding relations ofthe particles from nano-order 3D-CT images at each deformation stage. The particles are deformation-proof and may have different geometries. First of all, some big particles are considered as landmarks and matched between pre- and post-deformation. The results oflandmark matching make it easy to match many remaining particles and pores.