For optimization and accurate prediction of the amount of H-ion production in negative ion sources, analysis of electron energy distribution function (EEDF) is necessary. We are developing a numerical code which analyzes EEDF in the tandem-type arc-discharge source. It is a three-dimensional Monte Carlo simulation code with realistic geometry and magnetic configuration. Coulomb collision between electrons is treated with the "binary collision" model and collisions with hydrogen species are treated with the "null-collision" method. We applied this code to the analysis of the JAEA 10 A negative ion source. The numerical result shows that the obtained EEDF is in good agreement with experimental results.
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