3D structural foramation utilizing glass transition of a Parylene film

Tetsuo Kan; Akihiro Isozaki; Hidetoshi Takahashi; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2015.7050975

3D structural foramation utilizing glass transition of a Parylene film

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature T_g of the Parylene, 80-100 °C, and then cooled down below T_g. In this process, the rearrangement of the Parylene film happens above T_g, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.

Original language	English
Article number	7050975
Pages (from-to)	405-408
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2015-February
Issue number	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050975
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2015.7050975

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3D structural foramation utilizing glass transition of a Parylene film. / Kan, Tetsuo; Isozaki, Akihiro; Takahashi, Hidetoshi et al.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7050975, 26.02.2015, p. 405-408.

Research output: Contribution to journal › Conference article › peer-review

@article{895e54ab829e4a9185c6627bf7ab6a28,

title = "3D structural foramation utilizing glass transition of a Parylene film",

abstract = "This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.",

author = "Tetsuo Kan and Akihiro Isozaki and Hidetoshi Takahashi and Kiyoshi Matsumoto and Isao Shimoyama",

year = "2015",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2015.7050975",

language = "English",

volume = "2015-February",

pages = "405--408",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "February",

note = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

}

TY - JOUR

T1 - 3D structural foramation utilizing glass transition of a Parylene film

AU - Kan, Tetsuo

AU - Isozaki, Akihiro

AU - Takahashi, Hidetoshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2015/2/26

Y1 - 2015/2/26

N2 - This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.

AB - This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.

UR - http://www.scopus.com/inward/record.url?scp=84931046712&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84931046712&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2015.7050975

DO - 10.1109/MEMSYS.2015.7050975

M3 - Conference article

AN - SCOPUS:84931046712

SN - 1084-6999

VL - 2015-February

SP - 405

EP - 408

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

IS - February

M1 - 7050975

T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

Y2 - 18 January 2015 through 22 January 2015

ER -

3D structural foramation utilizing glass transition of a Parylene film

Abstract

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