3D structural foramation utilizing glass transition of a Parylene film

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalConference article

Abstract

This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature Tg of the Parylene, 80-100 °C, and then cooled down below Tg. In this process, the rearrangement of the Parylene film happens above Tg, and the consolidated Parylene after the cooling down maintains three-dimensional micro structures as actuated. In a proof-of-principle experiment, the three-dimensional spiral structures formed by 300-nm-thick silicon were fixed by 1-μm-thick Parylene film.

Original languageEnglish
Article number7050975
Pages (from-to)405-408
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

Fingerprint

actuation
Glass transition
Thin films
microstructure
Microstructure
glass
thin films
Thick films
glass transition temperature
ambient temperature
thick films
Cooling
cooling
Fabrication
Silicon
fabrication
silicon
Experiments
Temperature
parylene

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

3D structural foramation utilizing glass transition of a Parylene film. / Kan, Tetsuo; Isozaki, Akihiro; Takahashi, Hidetoshi; Matsumoto, Kiyoshi; Shimoyama, Isao.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7050975, 26.02.2015, p. 405-408.

Research output: Contribution to journalConference article

Kan, Tetsuo ; Isozaki, Akihiro ; Takahashi, Hidetoshi ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / 3D structural foramation utilizing glass transition of a Parylene film. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2015 ; Vol. 2015-February, No. February. pp. 405-408.
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