A barometric pressure sensor based on the air-gap scale effect in a cantilever

Nguyen Minh-Dung, Hidetoshi Takahashi, Takeshi Uchiyama, Kiyoshi Matsumoto, Isao Shimoyama

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Abstract

The most common structure for a conventional barometric pressure sensor consists of a vacuum-sealed cavity and a diaphragm. However, we hypothesize that a simple structure with an unsealed cavity and an ultra-thin cantilever can provide more sensitive measurements. We produced a 300-nm-thick cantilever with a small spring constant, which made the cantilever sensitive to low pressures. We demonstrated that miniaturizing the air-gap of the cantilever enables the sensor to measure barometric pressure changes at a low pressure change rate with a high resolution, which was 1 Pa at 0.05 Hz, and for a gap size of 1.7 μm.

Original languageEnglish
Article number143505
JournalApplied Physics Letters
Volume103
Issue number14
DOIs
Publication statusPublished - 2013 Oct 21
Externally publishedYes

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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