TY - JOUR
T1 - A barometric pressure sensor based on the air-gap scale effect in a cantilever
AU - Minh-Dung, Nguyen
AU - Takahashi, Hidetoshi
AU - Uchiyama, Takeshi
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
N1 - Funding Information:
Fabrication of the EB photo-mask was performed using the EB lithography apparatus at the VLSI Design and Education Center (VDEC) at the University of Tokyo. This research was partially supported by the Japan Society for the Promotion of Science (JSPS).
PY - 2013/9/30
Y1 - 2013/9/30
N2 - The most common structure for a conventional barometric pressure sensor consists of a vacuum-sealed cavity and a diaphragm. However, we hypothesize that a simple structure with an unsealed cavity and an ultra-thin cantilever can provide more sensitive measurements. We produced a 300-nm-thick cantilever with a small spring constant, which made the cantilever sensitive to low pressures. We demonstrated that miniaturizing the air-gap of the cantilever enables the sensor to measure barometric pressure changes at a low pressure change rate with a high resolution, which was 1 Pa at 0.05 Hz, and for a gap size of 1.7 μm.
AB - The most common structure for a conventional barometric pressure sensor consists of a vacuum-sealed cavity and a diaphragm. However, we hypothesize that a simple structure with an unsealed cavity and an ultra-thin cantilever can provide more sensitive measurements. We produced a 300-nm-thick cantilever with a small spring constant, which made the cantilever sensitive to low pressures. We demonstrated that miniaturizing the air-gap of the cantilever enables the sensor to measure barometric pressure changes at a low pressure change rate with a high resolution, which was 1 Pa at 0.05 Hz, and for a gap size of 1.7 μm.
UR - http://www.scopus.com/inward/record.url?scp=84885656201&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885656201&partnerID=8YFLogxK
U2 - 10.1063/1.4824027
DO - 10.1063/1.4824027
M3 - Article
AN - SCOPUS:84885656201
SN - 0003-6951
VL - 103
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 14
M1 - 143505
ER -