A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

H. Takahashi; A. Isozaki; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2015.7051055

A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

H. Takahashi, A. Isozaki, K. Matsumoto, I. Shimoyama

Research output: Contribution to journal › Conference article › peer-review

4 Citations (Scopus)

Abstract

This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.

Original language	English
Article number	7051055
Pages (from-to)	706-709
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2015-February
Issue number	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051055
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. / Takahashi, H.; Isozaki, A.; Matsumoto, K.; Shimoyama, I.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7051055, 26.02.2015, p. 706-709.

Research output: Contribution to journal › Conference article › peer-review

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A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

Abstract

ASJC Scopus subject areas

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