Abstract
This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.
| Original language | English |
|---|---|
| Article number | 7051055 |
| Pages (from-to) | 706-709 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Volume | 2015-February |
| Issue number | February |
| DOIs | |
| Publication status | Published - 2015 Feb 26 |
| Externally published | Yes |
| Event | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Takahashi, H., Isozaki, A., Matsumoto, K., & Shimoyama, I. (2015). A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015-February(February), 706-709. [7051055]. https://doi.org/10.1109/MEMSYS.2015.7051055