A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

H. Takahashi; A. Isozaki; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2015.7051055

A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

H. Takahashi, A. Isozaki, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	706-709
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051055
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2015.7051055

Cite this

Takahashi, H., Isozaki, A., Matsumoto, K., & Shimoyama, I. (2015). A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 706-709). [7051055] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051055

A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. / Takahashi, H.; Isozaki, A.; Matsumoto, K. et al.

2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 706-709 7051055 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takahashi, H, Isozaki, A, Matsumoto, K & Shimoyama, I 2015, A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051055, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 706-709, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7051055

Takahashi H, Isozaki A, Matsumoto K, Shimoyama I. A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 706-709. 7051055. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051055

Takahashi, H. ; Isozaki, A. ; Matsumoto, K. et al. / A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 706-709 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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AB - This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.

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A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

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