A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak

H. Takahashi, A. Isozaki, K. Matsumoto, I. Shimoyama

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

This paper reports a cantilever with comb structure, inspired by a bristled wing of thrips which acts as a continuous membrane wing because of the effects of low Reynolds numbers. The comb structures are formed at the edges of the cantilever and its surrounding frame. When differential pressure is applied to the cantilever, both comb structures act as airflow suppression through the gap. The leakage of the fabricated comb cantilever was smaller than the normal cantilever due to the overlapping area of the combs, even the gap area was twice larger. The proposed structure will be utilized as a high sensitive barometric pressure change detector.

Original languageEnglish
Article number7051055
Pages (from-to)706-709
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'A cantilever with comb structure modeled by a bristled wing of thrips for slight air leak'. Together they form a unique fingerprint.

  • Cite this