A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces

Kodai Nagayama; Jiwang Yan

A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces

Kodai Nagayama, Jiwang Yan

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

Slow tool servo (STS) is widely used to fabricate freeform optical elements. However, it is still difficult to obtain nanometer-level form accuracy in a short time due to characteristic error factors such as the tool trajectory error and the dynamic follow-up error of machine tools. In this study, we proposed a new machining flow, which included error factor modification and error prediction, to improve the form accuracy in machining freeform surfaces by STS. Comprehensive error analysis and modelling was performed to identify all the main error factors, some of which have never been taken into account by previous researchers. Numerical simulation was then carried out to clarify the relationship between these error factors and the form error of the finished surface. Using the proposed error correction/prediction system, fabrication of micron-level sinusoidal wave grids was attempted on single-crystal silicon. The form accuracy was successfully improved to the nanometer-level.

Original language	English
Title of host publication	European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
Editors	O. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
Publisher	euspen
Pages	51-52
Number of pages	2
ISBN (Print)	9780995775121
Publication status	Published - 2018 Jan 1
Event	18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy Duration: 2018 Jun 4 → 2018 Jun 8

Other

Other	18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
Country/Territory	Italy
City	Venice
Period	18/6/4 → 18/6/8

Keywords

Diamond turning
Freeform surface
Single crystal silicon
Sinusoidal wave grid
Slow tool servo
Ultraprecision machining

ASJC Scopus subject areas

Industrial and Manufacturing Engineering
Instrumentation
Environmental Engineering
Mechanical Engineering
Materials Science(all)

Cite this

Nagayama, K., & Yan, J. (2018). A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018 (pp. 51-52). euspen.

A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces. / Nagayama, Kodai; Yan, Jiwang.

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. euspen, 2018. p. 51-52.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nagayama, K & Yan, J 2018, A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces. in O Riemer, E Savio, D Billington, RK Leach & D Phillips (eds), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. euspen, pp. 51-52, 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018, Venice, Italy, 18/6/4.

Nagayama, Kodai ; Yan, Jiwang. / A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces. European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. editor / O. Riemer ; Enrico Savio ; D. Billington ; R. K. Leach ; D. Phillips. euspen, 2018. pp. 51-52

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abstract = "Slow tool servo (STS) is widely used to fabricate freeform optical elements. However, it is still difficult to obtain nanometer-level form accuracy in a short time due to characteristic error factors such as the tool trajectory error and the dynamic follow-up error of machine tools. In this study, we proposed a new machining flow, which included error factor modification and error prediction, to improve the form accuracy in machining freeform surfaces by STS. Comprehensive error analysis and modelling was performed to identify all the main error factors, some of which have never been taken into account by previous researchers. Numerical simulation was then carried out to clarify the relationship between these error factors and the form error of the finished surface. Using the proposed error correction/prediction system, fabrication of micron-level sinusoidal wave grids was attempted on single-crystal silicon. The form accuracy was successfully improved to the nanometer-level.",

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N2 - Slow tool servo (STS) is widely used to fabricate freeform optical elements. However, it is still difficult to obtain nanometer-level form accuracy in a short time due to characteristic error factors such as the tool trajectory error and the dynamic follow-up error of machine tools. In this study, we proposed a new machining flow, which included error factor modification and error prediction, to improve the form accuracy in machining freeform surfaces by STS. Comprehensive error analysis and modelling was performed to identify all the main error factors, some of which have never been taken into account by previous researchers. Numerical simulation was then carried out to clarify the relationship between these error factors and the form error of the finished surface. Using the proposed error correction/prediction system, fabrication of micron-level sinusoidal wave grids was attempted on single-crystal silicon. The form accuracy was successfully improved to the nanometer-level.

AB - Slow tool servo (STS) is widely used to fabricate freeform optical elements. However, it is still difficult to obtain nanometer-level form accuracy in a short time due to characteristic error factors such as the tool trajectory error and the dynamic follow-up error of machine tools. In this study, we proposed a new machining flow, which included error factor modification and error prediction, to improve the form accuracy in machining freeform surfaces by STS. Comprehensive error analysis and modelling was performed to identify all the main error factors, some of which have never been taken into account by previous researchers. Numerical simulation was then carried out to clarify the relationship between these error factors and the form error of the finished surface. Using the proposed error correction/prediction system, fabrication of micron-level sinusoidal wave grids was attempted on single-crystal silicon. The form accuracy was successfully improved to the nanometer-level.

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A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces

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Keywords

ASJC Scopus subject areas

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