A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces

Kodai Nagayama, Jiwang Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Slow tool servo (STS) is widely used to fabricate freeform optical elements. However, it is still difficult to obtain nanometer-level form accuracy in a short time due to characteristic error factors such as the tool trajectory error and the dynamic follow-up error of machine tools. In this study, we proposed a new machining flow, which included error factor modification and error prediction, to improve the form accuracy in machining freeform surfaces by STS. Comprehensive error analysis and modelling was performed to identify all the main error factors, some of which have never been taken into account by previous researchers. Numerical simulation was then carried out to clarify the relationship between these error factors and the form error of the finished surface. Using the proposed error correction/prediction system, fabrication of micron-level sinusoidal wave grids was attempted on single-crystal silicon. The form accuracy was successfully improved to the nanometer-level.

Original languageEnglish
Title of host publicationEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
EditorsO. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
Publishereuspen
Pages51-52
Number of pages2
ISBN (Print)9780995775121
Publication statusPublished - 2018 Jan 1
Event18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy
Duration: 2018 Jun 42018 Jun 8

Other

Other18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
CountryItaly
CityVenice
Period18/6/418/6/8

Keywords

  • Diamond turning
  • Freeform surface
  • Single crystal silicon
  • Sinusoidal wave grid
  • Slow tool servo
  • Ultraprecision machining

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Environmental Engineering
  • Mechanical Engineering
  • Materials Science(all)

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  • Cite this

    Nagayama, K., & Yan, J. (2018). A comprehensive error correction/prediction system for tool-servo driven diamond turning of freeform surfaces. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018 (pp. 51-52). euspen.