A correlation between particle growth and spatiotemporal RF plasma structure

T. Kamata, S. Kakuta, Y. Yamaguchi, T. Makabe

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF2CF2-)n and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.

Original languageEnglish
Article number011
Pages (from-to)310-313
Number of pages4
JournalPlasma Sources Science and Technology
Volume3
Issue number3
DOIs
Publication statusPublished - 1994 Dec 1

ASJC Scopus subject areas

  • Condensed Matter Physics

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