A gas sensor based on viscosity change of ionic liquid

Kazuharu Ohsawa, Hidetoshi Takahashi, Kentaro Noda, Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm × 1.5 mm × 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 μm × 200 μm × 0.5 μm and 0.4 ×ℓ, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages525-528
Number of pages4
DOIs
Publication statusPublished - 2011 Apr 13
Externally publishedYes
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Ohsawa, K., Takahashi, H., Noda, K., Kan, T., Matsumoto, K., & Shimoyama, I. (2011). A gas sensor based on viscosity change of ionic liquid. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 525-528). [5734477] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734477