TY - JOUR
T1 - A monolithically integrated three-axis accelerometer using CMOS compatible stress-sensitive differential amplifiers
AU - Takao, Hidekuni
AU - Matsumoto, Yoshinori
AU - Ishida, Makoto
N1 - Funding Information:
He has been supported from the Japan Society of the Promotion of Science (JSPS) since 1998 and is working at Toyohashi University of Technology as a postdoctoral fellow. He is currently working on micromechanical smart sensors with SOI technology and development of micromachining process technologies.
PY - 1999
Y1 - 1999
N2 - In this paper, the development of a bulk-microniachined CMOS integrated three-axis accelerometer which includes analog signal conditioning circuits is presented. The accelerometer was designed to simplify the signal processing tasks by incorporating a set of circuits for three-axis signal conditioning. This approach resulted in a 25% reduction of the circuit area. Stress-sensitive differential amplifiers (SSDA's) have been used as signal transducers, because they can be conveniently formed in a small area. The sensitivity and resolution of the fabricated devices realized in 8 x 8 mm2 die area were 192 mV/g and 0.024 g for Z-axis acceleration, and 23 mV/g and 0.23 g for X and Y axis acceleration, respectively. The electrical noise component in the analog CMOS circuits was reduced by using a chopper stabilization technique. It was observed that there is a proper chopping clock frequency range to maximize the noise reduction effect. The noise of the SSDA was found to be related with the characteristics of CMOS differential amplifiers used. Typical temperature coefficient of sensitivity was about -2000 ppm/°C, which could be reduced to -320 ppm/ °C or less by selecting a proper bias condition.
AB - In this paper, the development of a bulk-microniachined CMOS integrated three-axis accelerometer which includes analog signal conditioning circuits is presented. The accelerometer was designed to simplify the signal processing tasks by incorporating a set of circuits for three-axis signal conditioning. This approach resulted in a 25% reduction of the circuit area. Stress-sensitive differential amplifiers (SSDA's) have been used as signal transducers, because they can be conveniently formed in a small area. The sensitivity and resolution of the fabricated devices realized in 8 x 8 mm2 die area were 192 mV/g and 0.024 g for Z-axis acceleration, and 23 mV/g and 0.23 g for X and Y axis acceleration, respectively. The electrical noise component in the analog CMOS circuits was reduced by using a chopper stabilization technique. It was observed that there is a proper chopping clock frequency range to maximize the noise reduction effect. The noise of the SSDA was found to be related with the characteristics of CMOS differential amplifiers used. Typical temperature coefficient of sensitivity was about -2000 ppm/°C, which could be reduced to -320 ppm/ °C or less by selecting a proper bias condition.
KW - Acceleration measurement
KW - CMOS integrated circuits
KW - Differential amplifiers
KW - Intelligent sensors
KW - Piezoresistive devices
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U2 - 10.1109/16.737448
DO - 10.1109/16.737448
M3 - Article
AN - SCOPUS:0032760790
SN - 0018-9383
VL - 46
SP - 109
EP - 116
JO - IEEE Transactions on Electron Devices
JF - IEEE Transactions on Electron Devices
IS - 1
ER -