A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices

Yoshinori Matsumoto, Kazumasa Yoshida, Makoto Ishida

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

Several deposition techniques and the characteristics of fluorocarbon (FC) films have been investigated. First, FC film is spin-coated from cyclized perfluoro polymer (CPFP), commercialized as CYTOP. Because of its excellent durability for alkalis or acids, the FC film is used for protection of the circuit area of an integrated accelerometer from a silicon alkaline etching process by 25 wt.% TMAH at 90°C. Secondly, FC films are formed on a field-free zone with a capacitive-coupling-type plasma-polymerization equipment using perfluorinated liquids (C7F16, C8F18, etc.) as monomer species. The deposition rates and thermal stability of the films have been investigated. The FC films are effective for elimination of in-use stiction for surface-micromachined devices.

Original languageEnglish
Pages (from-to)308-314
Number of pages7
JournalSensors and Actuators, A: Physical
Volume66
Issue number1-3
Publication statusPublished - 1998 Apr 1
Externally publishedYes

Fingerprint

Fluorocarbons
fluorocarbons
stiction
Stiction
Plasma polymerization
Alkalies
Silicon
accelerometers
Deposition rates
durability
Accelerometers
elimination
Etching
alkalies
Polymers
Durability
Thermodynamic stability
thermal stability
polymerization
monomers

Keywords

  • CYTOP
  • Fluorocarbon film
  • In-use stiction
  • Integrated sensors
  • Plasma polymerization

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices. / Matsumoto, Yoshinori; Yoshida, Kazumasa; Ishida, Makoto.

In: Sensors and Actuators, A: Physical, Vol. 66, No. 1-3, 01.04.1998, p. 308-314.

Research output: Contribution to journalArticle

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