A novel sustaining mechanism in capacitively coupled radio frequency plasma in oxygen

Mari Shibata, Toshiaki Makabe, Nobuhiko Nakano

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

This study presents numerical evidence regarding a new type of self-sustaining mechanism for capacitively-coupled-radiofrequency plasma utilizing a self-consistent relaxation continuum model. The regime's existence depends on an electron source, produced by a detachment reaction from negative ions with high density in the bulk plasma, under a system that the spatiotemporal total rate of electron attachment is greater than that of ionization. That is, a novel mechanism differs markedly from previous ones that radiofrequency plasmas are mainly sustained by the ionization multiplication of low density electrons in a sheath/plasma boundary. The consequences of this finding are discussed from both charge balance and reaction sequence balance in the bulk plasma at 13.56 MHz in oxygen.

Original languageEnglish
Pages (from-to)4182-4185
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number7
Publication statusPublished - 1998 Jul

Fingerprint

sustaining
radio frequencies
Plasmas
Oxygen
oxygen
Ionization
Plasma sheaths
Electron sources
ionization
plasma sheaths
electron sources
electron attachment
detachment
multiplication
negative ions
Carrier concentration
Negative ions
continuums
Electrons

Keywords

  • Capacitively-coupled-plasma
  • Electron attachment
  • Electron detachment
  • Negative ions
  • Novel sustaining mechanism
  • Oxygen plasma
  • RCT model
  • rf plasma

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

Cite this

A novel sustaining mechanism in capacitively coupled radio frequency plasma in oxygen. / Shibata, Mari; Makabe, Toshiaki; Nakano, Nobuhiko.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 37, No. 7, 07.1998, p. 4182-4185.

Research output: Contribution to journalArticle

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