A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator

K. Nakahara, K. Yoshimura, Y. Okayama, Norihisa Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

We demonstrate a peristaltic micropump that utilizes traveling waves of polymer membranes to transport liquids. This micropump does not require any valves and more importantly, the traveling waves can be generated by a single actuator. The micropump contains hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible glycerin in a micro chamber that has different cross-sectional area at the top and the bottom to amplify the amplitude of the traveling waves. The manufactured micropump achieved a flow rate of 1.3 ml/min, which was by far more efficient than a micropump without HDAM.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages1083-1086
Number of pages4
DOIs
Publication statusPublished - 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Nakahara, K., Yoshimura, K., Okayama, Y., & Miki, N. (2011). A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1083-1086). [5734617] https://doi.org/10.1109/MEMSYS.2011.5734617