A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator

K. Nakahara, K. Yoshimura, Y. Okayama, N. Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

We demonstrate a peristaltic micropump that utilizes traveling waves of polymer membranes to transport liquids. This micropump does not require any valves and more importantly, the traveling waves can be generated by a single actuator. The micropump contains hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible glycerin in a micro chamber that has different cross-sectional area at the top and the bottom to amplify the amplitude of the traveling waves. The manufactured micropump achieved a flow rate of 1.3 ml/min, which was by far more efficient than a micropump without HDAM.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages1083-1086
Number of pages4
DOIs
Publication statusPublished - 2011 Apr 13
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Nakahara, K., Yoshimura, K., Okayama, Y., & Miki, N. (2011). A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 1083-1086). [5734617] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734617