TY - JOUR
T1 - A photoresponse-compensated parallel piezoresistive cantilever for cellular force measurements
AU - Jung, Uijin G.
AU - Kuwana, Kenta
AU - Ajiki, Yoshiharu
AU - Takahashi, Hidetoshi
AU - Kan, Tetsuo
AU - Takei, Yusuke
AU - Noda, Kentaro
AU - Iwase, Eiji
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2013/4
Y1 - 2013/4
N2 - This paper describes a parallel piezoresistive cantilever that is composed of a force-sensing cantilever in addition to a reference cantilever for photoresponse compensation. Piezoresistive cantilevers have been applied in many cellular mechanical measurement studies because of their high sensitivity, high time resolution and ease of handling. However, the electrical resistance changes in response to the excitation light of the fluorescence microscope, which affects the cell measurements. We measured the I-V characteristics of a piezoresistive layer. These photoresponses occurred due to the internal photoelectric effect. We canceled the photoresponses using the reference cantilever. This paper demonstrates compensation of the cantilever photoresponse under irradiation at different angles, wavelengths and light intensities. As a result, the photoresponse could be decreased by 87%.
AB - This paper describes a parallel piezoresistive cantilever that is composed of a force-sensing cantilever in addition to a reference cantilever for photoresponse compensation. Piezoresistive cantilevers have been applied in many cellular mechanical measurement studies because of their high sensitivity, high time resolution and ease of handling. However, the electrical resistance changes in response to the excitation light of the fluorescence microscope, which affects the cell measurements. We measured the I-V characteristics of a piezoresistive layer. These photoresponses occurred due to the internal photoelectric effect. We canceled the photoresponses using the reference cantilever. This paper demonstrates compensation of the cantilever photoresponse under irradiation at different angles, wavelengths and light intensities. As a result, the photoresponse could be decreased by 87%.
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U2 - 10.1088/0960-1317/23/4/045015
DO - 10.1088/0960-1317/23/4/045015
M3 - Article
AN - SCOPUS:84878092600
SN - 0960-1317
VL - 23
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 4
M1 - 045015
ER -