A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

Research output: Contribution to journalArticle

7 Citations (Scopus)


This paper describes a piezoelectric differential pressure sensor using a cantilevered structure with dimensions of 1500 × 1000 × 2 μm 3. A high degree of sensitivity is achieved without the power supply because only the base part of the cantilever is fixed and the piezoelectric material is used as a sensing element. The measurements indicate that the fabricated cantilever bends and a piezoelectric voltage was generated matching the piezoelectric theory for when a differential pressure is applied. The sensitivity to the applied differential pressure was 2.4 mV Pa-1 for a range between -30 Pa and 30 Pa. Additionally, it was also demonstrated that the sensor performs as a wake-up switch during the pressure shifts of 10 Pa with low-power consumption.

Original languageEnglish
Article number125023
JournalJournal of Micromechanics and Microengineering
Issue number12
Publication statusPublished - 2013 Dec 1


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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