A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch

Yutaka Tomimatsu; Hidetoshi Takahashi; Takeshi Kobayashi; Kiyoshi Matsumoto; Isao Shimoyama; Toshihiro Itoh; Ryutaro Maeda

doi:10.1088/0960-1317/23/12/125023

A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

This paper describes a piezoelectric differential pressure sensor using a cantilevered structure with dimensions of 1500 × 1000 × 2 μm ³. A high degree of sensitivity is achieved without the power supply because only the base part of the cantilever is fixed and the piezoelectric material is used as a sensing element. The measurements indicate that the fabricated cantilever bends and a piezoelectric voltage was generated matching the piezoelectric theory for when a differential pressure is applied. The sensitivity to the applied differential pressure was 2.4 mV Pa^-1 for a range between -30 Pa and 30 Pa. Additionally, it was also demonstrated that the sensor performs as a wake-up switch during the pressure shifts of 10 Pa with low-power consumption.

Original language	English
Article number	125023
Journal	Journal of Micromechanics and Microengineering
Volume	23
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/23/12/125023
Publication status	Published - 2013 Dec 1
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/23/12/125023

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A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi; Matsumoto, Kiyoshi; Shimoyama, Isao; Itoh, Toshihiro; Maeda, Ryutaro.

In: Journal of Micromechanics and Microengineering, Vol. 23, No. 12, 125023, 01.12.2013.

Research output: Contribution to journal › Article › peer-review

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