Abstract
This paper describes a piezoelectric differential pressure sensor using a cantilevered structure with dimensions of 1500 × 1000 × 2 μm 3. A high degree of sensitivity is achieved without the power supply because only the base part of the cantilever is fixed and the piezoelectric material is used as a sensing element. The measurements indicate that the fabricated cantilever bends and a piezoelectric voltage was generated matching the piezoelectric theory for when a differential pressure is applied. The sensitivity to the applied differential pressure was 2.4 mV Pa-1 for a range between -30 Pa and 30 Pa. Additionally, it was also demonstrated that the sensor performs as a wake-up switch during the pressure shifts of 10 Pa with low-power consumption.
| Original language | English |
|---|---|
| Article number | 125023 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 23 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 2013 Dec 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi; Matsumoto, Kiyoshi; Shimoyama, Isao; Itoh, Toshihiro; Maeda, Ryutaro.
In: Journal of Micromechanics and Microengineering, Vol. 23, No. 12, 125023, 01.12.2013.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch
AU - Tomimatsu, Yutaka
AU - Takahashi, Hidetoshi
AU - Kobayashi, Takeshi
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
AU - Itoh, Toshihiro
AU - Maeda, Ryutaro
PY - 2013/12/1
Y1 - 2013/12/1
N2 - This paper describes a piezoelectric differential pressure sensor using a cantilevered structure with dimensions of 1500 × 1000 × 2 μm 3. A high degree of sensitivity is achieved without the power supply because only the base part of the cantilever is fixed and the piezoelectric material is used as a sensing element. The measurements indicate that the fabricated cantilever bends and a piezoelectric voltage was generated matching the piezoelectric theory for when a differential pressure is applied. The sensitivity to the applied differential pressure was 2.4 mV Pa-1 for a range between -30 Pa and 30 Pa. Additionally, it was also demonstrated that the sensor performs as a wake-up switch during the pressure shifts of 10 Pa with low-power consumption.
AB - This paper describes a piezoelectric differential pressure sensor using a cantilevered structure with dimensions of 1500 × 1000 × 2 μm 3. A high degree of sensitivity is achieved without the power supply because only the base part of the cantilever is fixed and the piezoelectric material is used as a sensing element. The measurements indicate that the fabricated cantilever bends and a piezoelectric voltage was generated matching the piezoelectric theory for when a differential pressure is applied. The sensitivity to the applied differential pressure was 2.4 mV Pa-1 for a range between -30 Pa and 30 Pa. Additionally, it was also demonstrated that the sensor performs as a wake-up switch during the pressure shifts of 10 Pa with low-power consumption.
UR - http://www.scopus.com/inward/record.url?scp=84889048604&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84889048604&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/23/12/125023
DO - 10.1088/0960-1317/23/12/125023
M3 - Article
AN - SCOPUS:84889048604
VL - 23
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 12
M1 - 125023
ER -