A planar fluxgate magnetic sensor for on-chip integration

Sang On Choi, Shoji Kawahito, Kinya Takahashi, Yoshinori Matsumoto, Makoto Ishida, Yoshiaki Tadokoro

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

In this paper, we present a planar fluxgate magnetic sensor for on-chip integration using silicon process technology. The fabrication process is simplified by using a newly developed sensing element which is composed of thin-film ferromagnetic cores at the top layer, and excitation and differential pick-up coils. The sensor core used is permalloy film deposited by sputtering. The coils are fabricated using a two-layer metallization process. The fabrication process for the sensing element is suitable for integrating the on-chip interface circuits. In order to achieve the optimum excitation condition, the sensing element structure is investigated by means of computation analysis. The sensing element is fabricated with 2-μm-thick, 1400-μm-long cores and excitation and pick-up coils (25 turns each). The sensing element fabricated using planar technology has a magnetic sensitivity of about 73 V/T at an excitation frequency of 1 MHz and a driver current of 150 mAp-p.

Original languageEnglish
Pages (from-to)241-252
Number of pages12
JournalSensors and Materials
Volume9
Issue number4
Publication statusPublished - 1997
Externally publishedYes

Fingerprint

Magnetic sensors
chips
Fabrication
sensors
Silicon
Metallizing
coils
Sputtering
excitation
Thin films
Networks (circuits)
Sensors
fabrication
Permalloys (trademark)
sputtering
sensitivity
silicon
thin films

Keywords

  • Fluxgate
  • Integration
  • Magnetic field analysis
  • Magnetic sensor

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation

Cite this

Choi, S. O., Kawahito, S., Takahashi, K., Matsumoto, Y., Ishida, M., & Tadokoro, Y. (1997). A planar fluxgate magnetic sensor for on-chip integration. Sensors and Materials, 9(4), 241-252.

A planar fluxgate magnetic sensor for on-chip integration. / Choi, Sang On; Kawahito, Shoji; Takahashi, Kinya; Matsumoto, Yoshinori; Ishida, Makoto; Tadokoro, Yoshiaki.

In: Sensors and Materials, Vol. 9, No. 4, 1997, p. 241-252.

Research output: Contribution to journalArticle

Choi, SO, Kawahito, S, Takahashi, K, Matsumoto, Y, Ishida, M & Tadokoro, Y 1997, 'A planar fluxgate magnetic sensor for on-chip integration', Sensors and Materials, vol. 9, no. 4, pp. 241-252.
Choi SO, Kawahito S, Takahashi K, Matsumoto Y, Ishida M, Tadokoro Y. A planar fluxgate magnetic sensor for on-chip integration. Sensors and Materials. 1997;9(4):241-252.
Choi, Sang On ; Kawahito, Shoji ; Takahashi, Kinya ; Matsumoto, Yoshinori ; Ishida, Makoto ; Tadokoro, Yoshiaki. / A planar fluxgate magnetic sensor for on-chip integration. In: Sensors and Materials. 1997 ; Vol. 9, No. 4. pp. 241-252.
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