### Abstract

We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

Original language | English |
---|---|

Pages (from-to) | 154-159 |

Number of pages | 6 |

Journal | Chemical Physics |

Volume | 398 |

Issue number | 1 |

DOIs | |

Publication status | Published - 2012 Apr 4 |

### Keywords

- Cross sections
- Fluid models
- HBr
- Plasma etching
- Swarms
- Transport coefficients

### ASJC Scopus subject areas

- Physics and Astronomy(all)
- Physical and Theoretical Chemistry

## Fingerprint Dive into the research topics of 'A set of cross sections and transport coefficients for electrons in HBr'. Together they form a unique fingerprint.

## Cite this

Šašić, O., Dujko, S., Makabe, T., & Petrović, Z. L. (2012). A set of cross sections and transport coefficients for electrons in HBr.

*Chemical Physics*,*398*(1), 154-159. https://doi.org/10.1016/j.chemphys.2011.08.019