A set of cross sections and transport coefficients for electrons in HBr

O. Šašić, S. Dujko, T. Makabe, Z. Lj Petrović

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

Original languageEnglish
Pages (from-to)154-159
Number of pages6
JournalChemical Physics
Volume398
Issue number1
DOIs
Publication statusPublished - 2012 Apr 4

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Keywords

  • Cross sections
  • Fluid models
  • HBr
  • Plasma etching
  • Swarms
  • Transport coefficients

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physical and Theoretical Chemistry

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