Abstract
We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.
| Original language | English |
|---|---|
| Pages (from-to) | 154-159 |
| Number of pages | 6 |
| Journal | Chemical Physics |
| Volume | 398 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2012 Apr 4 |
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Keywords
- Cross sections
- Fluid models
- HBr
- Plasma etching
- Swarms
- Transport coefficients
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Physics and Astronomy(all)
Cite this
A set of cross sections and transport coefficients for electrons in HBr. / Šašić, O.; Dujko, S.; Makabe, T.; Petrović, Z. Lj.
In: Chemical Physics, Vol. 398, No. 1, 04.04.2012, p. 154-159.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A set of cross sections and transport coefficients for electrons in HBr
AU - Šašić, O.
AU - Dujko, S.
AU - Makabe, T.
AU - Petrović, Z. Lj
PY - 2012/4/4
Y1 - 2012/4/4
N2 - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.
AB - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.
KW - Cross sections
KW - Fluid models
KW - HBr
KW - Plasma etching
KW - Swarms
KW - Transport coefficients
UR - http://www.scopus.com/inward/record.url?scp=84860888539&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84860888539&partnerID=8YFLogxK
U2 - 10.1016/j.chemphys.2011.08.019
DO - 10.1016/j.chemphys.2011.08.019
M3 - Article
AN - SCOPUS:84860888539
VL - 398
SP - 154
EP - 159
JO - Chemical Physics
JF - Chemical Physics
SN - 0301-0104
IS - 1
ER -