A set of cross sections and transport coefficients for electrons in HBr

O. Šašić, S. Dujko, T. Makabe, Z. Lj Petrović

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

Original languageEnglish
Pages (from-to)154-159
Number of pages6
JournalChemical Physics
Volume398
Issue number1
DOIs
Publication statusPublished - 2012 Apr 4

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transport properties
Plasmas
Fluids
Electrons
cross sections
coefficients
electrons
electron scattering
direct current
fluids

Keywords

  • Cross sections
  • Fluid models
  • HBr
  • Plasma etching
  • Swarms
  • Transport coefficients

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Physics and Astronomy(all)

Cite this

A set of cross sections and transport coefficients for electrons in HBr. / Šašić, O.; Dujko, S.; Makabe, T.; Petrović, Z. Lj.

In: Chemical Physics, Vol. 398, No. 1, 04.04.2012, p. 154-159.

Research output: Contribution to journalArticle

Šašić, O, Dujko, S, Makabe, T & Petrović, ZL 2012, 'A set of cross sections and transport coefficients for electrons in HBr', Chemical Physics, vol. 398, no. 1, pp. 154-159. https://doi.org/10.1016/j.chemphys.2011.08.019
Šašić, O. ; Dujko, S. ; Makabe, T. ; Petrović, Z. Lj. / A set of cross sections and transport coefficients for electrons in HBr. In: Chemical Physics. 2012 ; Vol. 398, No. 1. pp. 154-159.
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