A set of cross sections and transport coefficients for electrons in HBr

O. Šašić; S. Dujko; T. Makabe; Z. Lj Petrović

doi:10.1016/j.chemphys.2011.08.019

A set of cross sections and transport coefficients for electrons in HBr

O. Šašić, S. Dujko, T. Makabe, Z. Lj Petrović

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Abstract

We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

Original language	English
Pages (from-to)	154-159
Number of pages	6
Journal	Chemical Physics
Volume	398
Issue number	1
DOIs	https://doi.org/10.1016/j.chemphys.2011.08.019
Publication status	Published - 2012 Apr 4

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Keywords

Cross sections
Fluid models
HBr
Plasma etching
Swarms
Transport coefficients

ASJC Scopus subject areas

Physics and Astronomy(all)
Physical and Theoretical Chemistry

Cite this

Šašić, O., Dujko, S., Makabe, T., & Petrović, Z. L. (2012). A set of cross sections and transport coefficients for electrons in HBr. Chemical Physics, 398(1), 154-159. https://doi.org/10.1016/j.chemphys.2011.08.019

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AU - Makabe, T.

AU - Petrović, Z. Lj

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N2 - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

AB - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

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KW - Plasma etching

KW - Swarms

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Access to Document

10.1016/j.chemphys.2011.08.019