Abstract
We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.
| Original language | English |
|---|---|
| Pages (from-to) | 154-159 |
| Number of pages | 6 |
| Journal | Chemical Physics |
| Volume | 398 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2012 Apr 4 |
Keywords
- Cross sections
- Fluid models
- HBr
- Plasma etching
- Swarms
- Transport coefficients
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Physical and Theoretical Chemistry
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Šašić, O., Dujko, S., Makabe, T., & Petrović, Z. L. (2012). A set of cross sections and transport coefficients for electrons in HBr. Chemical Physics, 398(1), 154-159. https://doi.org/10.1016/j.chemphys.2011.08.019