A set of cross sections and transport coefficients for electrons in HBr

O. Šašić; S. Dujko; T. Makabe; Z. Lj Petrović

doi:10.1016/j.chemphys.2011.08.019

A set of cross sections and transport coefficients for electrons in HBr

O. Šašić, S. Dujko, T. Makabe, Z. Lj Petrović

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Abstract

We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

Original language	English
Pages (from-to)	154-159
Number of pages	6
Journal	Chemical Physics
Volume	398
Issue number	1
DOIs	https://doi.org/10.1016/j.chemphys.2011.08.019
Publication status	Published - 2012 Apr 4

Keywords

Cross sections
Fluid models
HBr
Plasma etching
Swarms
Transport coefficients

ASJC Scopus subject areas

Physics and Astronomy(all)
Physical and Theoretical Chemistry

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10.1016/j.chemphys.2011.08.019

Cite this

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abstract = "We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.",

keywords = "Cross sections, Fluid models, HBr, Plasma etching, Swarms, Transport coefficients",

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note = "Funding Information: This work was funded by the MES ON171037 and II41011projects. Authors are grateful to J. Hor{\'a}{\v c}ek, M. Allan and the late Yong-Ki Kim for sending us their data some prior to publication and to the two referees for helping us improve the presentation of the paper.",

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AU - Šašić, O.

AU - Dujko, S.

AU - Makabe, T.

AU - Petrović, Z. Lj

N1 - Funding Information: This work was funded by the MES ON171037 and II41011projects. Authors are grateful to J. Horáček, M. Allan and the late Yong-Ki Kim for sending us their data some prior to publication and to the two referees for helping us improve the presentation of the paper.

PY - 2012/4/4

Y1 - 2012/4/4

N2 - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

AB - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

KW - Cross sections

KW - Fluid models

KW - HBr

KW - Plasma etching

KW - Swarms

KW - Transport coefficients

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JO - Chemical Physics

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A set of cross sections and transport coefficients for electrons in HBr

Abstract

Keywords

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