A set of cross sections and transport coefficients for electrons in HBr

O. Šašić; S. Dujko; T. Makabe; Z. Lj Petrović

doi:10.1016/j.chemphys.2011.08.019

A set of cross sections and transport coefficients for electrons in HBr

O. Šašić, S. Dujko, T. Makabe, Z. Lj Petrović

Vice-President

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

Original language	English
Pages (from-to)	154-159
Number of pages	6
Journal	Chemical Physics
Volume	398
Issue number	1
DOIs	https://doi.org/10.1016/j.chemphys.2011.08.019
Publication status	Published - 2012 Apr 4

Keywords

Cross sections
Fluid models
HBr
Plasma etching
Swarms
Transport coefficients

ASJC Scopus subject areas

Physics and Astronomy(all)
Physical and Theoretical Chemistry

Access to Document

10.1016/j.chemphys.2011.08.019

Fingerprint Dive into the research topics of 'A set of cross sections and transport coefficients for electrons in HBr'. Together they form a unique fingerprint.

Cite this

@article{c4153e83b8a841e9b614ef2847744cd9,

title = "A set of cross sections and transport coefficients for electrons in HBr",

abstract = "We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.",

keywords = "Cross sections, Fluid models, HBr, Plasma etching, Swarms, Transport coefficients",

author = "O. {\v S}a{\v s}i{\'c} and S. Dujko and T. Makabe and Petrovi{\'c}, {Z. Lj}",

note = "Funding Information: This work was funded by the MES ON171037 and II41011projects. Authors are grateful to J. Hor{\'a}{\v c}ek, M. Allan and the late Yong-Ki Kim for sending us their data some prior to publication and to the two referees for helping us improve the presentation of the paper. Copyright: Copyright 2012 Elsevier B.V., All rights reserved.",

year = "2012",

month = apr,

day = "4",

doi = "10.1016/j.chemphys.2011.08.019",

language = "English",

volume = "398",

pages = "154--159",

journal = "Chemical Physics",

issn = "0301-0104",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - A set of cross sections and transport coefficients for electrons in HBr

AU - Šašić, O.

AU - Dujko, S.

AU - Makabe, T.

AU - Petrović, Z. Lj

N1 - Funding Information: This work was funded by the MES ON171037 and II41011projects. Authors are grateful to J. Horáček, M. Allan and the late Yong-Ki Kim for sending us their data some prior to publication and to the two referees for helping us improve the presentation of the paper. Copyright: Copyright 2012 Elsevier B.V., All rights reserved.

PY - 2012/4/4

Y1 - 2012/4/4

N2 - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

AB - We have compiled a set of electron collision cross sections for HBr. It will be useful for a fluid modeling of HBr plasmas together with transport coefficients in both DC and RF, E and E × B fields. The calculation made use of a Monte Carlo technique. The transport coefficients are rather unstructured because the total cross section resembles that of a constant collisonal frequency model. Additional measurements of swarm parameters are required in order to obtain more acurate set of cross sections.

KW - Cross sections

KW - Fluid models

KW - HBr

KW - Plasma etching

KW - Swarms

KW - Transport coefficients

UR - http://www.scopus.com/inward/record.url?scp=84860888539&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84860888539&partnerID=8YFLogxK

U2 - 10.1016/j.chemphys.2011.08.019

DO - 10.1016/j.chemphys.2011.08.019

M3 - Article

AN - SCOPUS:84860888539

VL - 398

SP - 154

EP - 159

JO - Chemical Physics

JF - Chemical Physics

SN - 0301-0104

IS - 1

ER -