A Study on Autonomic High Speed Measurement of a Three Dimensional Shape by Using a Non-Contact Sensor for Detecting an Inclination Angle and a Gap Distance (2nd Report) —Development and Evaluation of the Sensor Element—

Hideki Aoyama, Kazuo Yamazaki, Keesein Lee, Kunitoshi Nishimura

Research output: Contribution to journalArticle


A non-contact sensor which can continuously and simultaneously detect the normal direction and the position of a measured point is a base of an autonomic high speed measuring system. In the 1st report, the sensor-element and the sensor are designed and performance of the element is clarified by computer simulations. Then this paper deals with the method for determining a normal direction and a position by using calibration data, which is based on linear interpolation method, and a development of the sensor-element. Also, performance of the developed sensor-element is investigated by basic experiments. The following three issues became clear from the experiments. (1) The sensor-element can detect a normal direction in the range from —45.0° to 45.0° and detect a position in the range from 2.7 mm to 6.0 mm for a diffuse surface. (2) For a specular surface, the range of a detected normal direction is restricted from —7.5° to 7.5°. (3) The sensor element has the accuracy of 3 μm with regard to detecting a position and the accuracy of 0.18° with regard to detecting a normal direction for a diffuse surface. In addition, it became clear that the simulation results shown in the 1st report are similar to the experiment results, so that validity of the simulation is confirmed.

Original languageEnglish
Pages (from-to)954-958
Number of pages5
JournalJournal of the Japan Society for Precision Engineering
Issue number7
Publication statusPublished - 1994
Externally publishedYes



  • high speed measurement
  • non-contact sensor
  • normal direction
  • optical fiber
  • position
  • three dimensional shape

ASJC Scopus subject areas

  • Mechanical Engineering

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