A wake-up switch using a piezoelectric differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

Original languageEnglish
Title of host publicationProceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing
Subtitle of host publicationSensing the Future, ISSNIP 2013
Pages23-26
Number of pages4
DOIs
Publication statusPublished - 2013 Aug 9
Externally publishedYes
Event2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 - Melbourne, VIC, Australia
Duration: 2013 Apr 22013 Apr 5

Publication series

NameProceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
Volume1

Conference

Conference2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
CountryAustralia
CityMelbourne, VIC
Period13/4/213/4/5

Fingerprint

Pressure sensors
Electric power utilization
Switches
Sensors
Sensor nodes
Capacitance
Thin films
Air

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Information Systems

Cite this

Tomimatsu, Y., Takahashi, H., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). A wake-up switch using a piezoelectric differential pressure sensor. In Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 (pp. 23-26). [6529757] (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013; Vol. 1). https://doi.org/10.1109/ISSNIP.2013.6529757

A wake-up switch using a piezoelectric differential pressure sensor. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi; Matsumoto, Kiyoshi; Shimoyama, Isao; Itoh, Toshihiro; Maeda, Ryutaro.

Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. p. 23-26 6529757 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013; Vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tomimatsu, Y, Takahashi, H, Kobayashi, T, Matsumoto, K, Shimoyama, I, Itoh, T & Maeda, R 2013, A wake-up switch using a piezoelectric differential pressure sensor. in Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013., 6529757, Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013, vol. 1, pp. 23-26, 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013, Melbourne, VIC, Australia, 13/4/2. https://doi.org/10.1109/ISSNIP.2013.6529757
Tomimatsu Y, Takahashi H, Kobayashi T, Matsumoto K, Shimoyama I, Itoh T et al. A wake-up switch using a piezoelectric differential pressure sensor. In Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. p. 23-26. 6529757. (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013). https://doi.org/10.1109/ISSNIP.2013.6529757
Tomimatsu, Yutaka ; Takahashi, Hidetoshi ; Kobayashi, Takeshi ; Matsumoto, Kiyoshi ; Shimoyama, Isao ; Itoh, Toshihiro ; Maeda, Ryutaro. / A wake-up switch using a piezoelectric differential pressure sensor. Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. pp. 23-26 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013).
@inproceedings{b62cb953f50948d4a4019d40fe5b6842,
title = "A wake-up switch using a piezoelectric differential pressure sensor",
abstract = "This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.",
author = "Yutaka Tomimatsu and Hidetoshi Takahashi and Takeshi Kobayashi and Kiyoshi Matsumoto and Isao Shimoyama and Toshihiro Itoh and Ryutaro Maeda",
year = "2013",
month = "8",
day = "9",
doi = "10.1109/ISSNIP.2013.6529757",
language = "English",
isbn = "9781467355001",
series = "Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013",
pages = "23--26",
booktitle = "Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing",

}

TY - GEN

T1 - A wake-up switch using a piezoelectric differential pressure sensor

AU - Tomimatsu, Yutaka

AU - Takahashi, Hidetoshi

AU - Kobayashi, Takeshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

PY - 2013/8/9

Y1 - 2013/8/9

N2 - This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

AB - This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

UR - http://www.scopus.com/inward/record.url?scp=84881085308&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84881085308&partnerID=8YFLogxK

U2 - 10.1109/ISSNIP.2013.6529757

DO - 10.1109/ISSNIP.2013.6529757

M3 - Conference contribution

AN - SCOPUS:84881085308

SN - 9781467355001

T3 - Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013

SP - 23

EP - 26

BT - Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing

ER -