A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.
|Number of pages||5|
|Journal||Measurement Science and Technology|
|Publication status||Published - 1991 Dec 1|
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Applied Mathematics