Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

F. Tochikubo, T. Makabe

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Abstract

A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.

Original languageEnglish
Article number003
Pages (from-to)1133-1137
Number of pages5
JournalMeasurement Science and Technology
Volume2
Issue number12
DOIs
Publication statusPublished - 1991 Dec 1

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ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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