Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

F. Tochikubo; T. Makabe

doi:10.1088/0957-0233/2/12/003

Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

F. Tochikubo, T. Makabe

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17 Citations (Scopus)

Abstract

A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p₅) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.

Original language	English
Article number	003
Pages (from-to)	1133-1137
Number of pages	5
Journal	Measurement Science and Technology
Volume	2
Issue number	12
DOIs	https://doi.org/10.1088/0957-0233/2/12/003
Publication status	Published - 1991 Dec 1

ASJC Scopus subject areas

Instrumentation
Engineering (miscellaneous)
Applied Mathematics

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10.1088/0957-0233/2/12/003

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@article{5dc64f45500541d8ae7b5a948be31a66,

title = "Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy",

abstract = "A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.",

author = "F. Tochikubo and T. Makabe",

year = "1991",

month = dec,

day = "1",

doi = "10.1088/0957-0233/2/12/003",

language = "English",

volume = "2",

pages = "1133--1137",

journal = "Measurement Science and Technology",

issn = "0957-0233",

publisher = "IOP Publishing Ltd.",

number = "12",

}

TY - JOUR

T1 - Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

AU - Tochikubo, F.

AU - Makabe, T.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.

AB - A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.

UR - http://www.scopus.com/inward/record.url?scp=0026370170&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026370170&partnerID=8YFLogxK

U2 - 10.1088/0957-0233/2/12/003

DO - 10.1088/0957-0233/2/12/003

M3 - Article

AN - SCOPUS:0026370170

SN - 0957-0233

VL - 2

SP - 1133

EP - 1137

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 12

M1 - 003

ER -

Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

Abstract

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