Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

Fumiyoshi Tochikubo, Toshiaki Makabe

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

A simple method of ray tracing is adopted to calibrate the absolute value of the net production rate by electron impact of excited species with short radiative lifetime in a discharge. As an example, the net excitation rate and density of Ar(3p5) are measured in the RF glow discharge at 13.56 MHz, 1 Torr in Ar.

Original languageEnglish
Pages (from-to)1133-1137
Number of pages5
JournalMeasurement Science and Technology
Volume2
Issue number12
DOIs
Publication statusPublished - 1991 Dec

Fingerprint

Optical emission spectroscopy
Glow discharges
optical emission spectroscopy
Ray tracing
Spectroscopy
Excitation
Electrons
Ray Tracing
radiative lifetime
Absolute value
ray tracing
glow discharges
electron impact
excitation
Lifetime
Electron

ASJC Scopus subject areas

  • Polymers and Plastics
  • Ceramics and Composites
  • Materials Science (miscellaneous)

Cite this

Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy. / Tochikubo, Fumiyoshi; Makabe, Toshiaki.

In: Measurement Science and Technology, Vol. 2, No. 12, 12.1991, p. 1133-1137.

Research output: Contribution to journalArticle

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