Absolute pressure sensors by air-tight electrical feedthrough structure

Masayoshi Esashi, Yoshinori Matsumoto, Shuichi Shoji

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

A new electrical feedthrough structure for silicon absolute pressure sensors has been developed, and has been applied to an integrated capacitive pressure sensor, a piezoresistive pressure sensor and a piezoresistive force sensor array for tactile imaging. The feedthrough structure is constructed from Pyrex glass, which has narrow through-holes engraved by electrochemical discharge drilling, and silicon, which has the diffused electrical feedthrough from the reference cavity. The reference cavity is hermetically sealed by glass-silicon anodic bonding. The metal contacts to the diffused feedthrough at the bottom of glass holes are made by CrCuAu evaporation through a metal mask. Using this structure, an electrical feedthrough from the reference cavity can be made without any air leakage. This structure is useful for the fabrication of absolute pressure sensors, acceleration sensors and so on.

Original languageEnglish
Pages (from-to)1048-1052
Number of pages5
JournalSensors and Actuators: A. Physical
Volume23
Issue number1-3
DOIs
Publication statusPublished - 1990
Externally publishedYes

Fingerprint

Pressure sensors
pressure sensors
Silicon
air
Air
Glass
cavities
glass
silicon
Metals
Capacitive sensors
sensors
Leakage (fluid)
Sensor arrays
borosilicate glass
drilling
metals
Masks
electric contacts
Drilling

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Absolute pressure sensors by air-tight electrical feedthrough structure. / Esashi, Masayoshi; Matsumoto, Yoshinori; Shoji, Shuichi.

In: Sensors and Actuators: A. Physical, Vol. 23, No. 1-3, 1990, p. 1048-1052.

Research output: Contribution to journalArticle

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