Actions of low- and high-energy electrons on the phase transition between E- and H-modes in an inductively coupled plasma in Ar

Yuichiro Hayashi, Yo Mitsui, Tetsuya Tatsumi, Toshiaki Makabe

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

It is known that an inductively coupled plasma (ICP) sustained by a radiofrequency current coil has a mode transition and hysteresis characteristics of the internal plasma parameter as a function of the external plasma parameter. We focus on the contributions of low- and high-energy electrons to the phase transition between the capacitive E-mode and the inductive H-mode in an ICP. Our analysis is based on the diagnostics for a time-resolved two-dimensional net excitation rate of short-lived excited atoms, mainly produced collisionally by low- and high-energy electrons by using an intensified charge coupled device optical image. Short-lived excited atoms Ar(2p 1) and Ar(2p9) with different excitation processes have been employed as optical probes in an axisymmetric configuration of the ICP chamber, driven at 13.56MHz by an external single-turn current coil at 300mTorr in pure Ar. The E-to-H transition is characterized by two time constants of electrons: establishment of an axisymmetric distribution by electron diffusion and the accumulation of symmetric high-density electrons in order to sustain the inductive discharge under a weak electromagnetic field. On the other hand, the H-to-E transition is strongly influenced by the presence of a long-lived excited atom (i.e. metastables).

Original languageEnglish
Article number073025
JournalNew Journal of Physics
Volume13
DOIs
Publication statusPublished - 2011 Jul

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high energy electrons
coils
energy
electron diffusion
metastable atoms
time constant
excitation
atoms
charge coupled devices
electromagnetic fields
chambers
hysteresis
probes
configurations
electrons

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Actions of low- and high-energy electrons on the phase transition between E- and H-modes in an inductively coupled plasma in Ar. / Hayashi, Yuichiro; Mitsui, Yo; Tatsumi, Tetsuya; Makabe, Toshiaki.

In: New Journal of Physics, Vol. 13, 073025, 07.2011.

Research output: Contribution to journalArticle

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