Advanced nanocluster ion source based on high-power impulse magnetron sputtering and time-resolved measurements of nanocluster formation

Chuhang Zhang, Hironori Tsunoyama, Hiroki Akatsuka, Hiroki Sekiya, Tomomi Nagase, Atsushi Nakajima

Research output: Contribution to journal › Article › peer-review

45 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds