Advanced nanocluster ion source based on high-power impulse magnetron sputtering and time-resolved measurements of nanocluster formation

Chuhang Zhang, Hironori Tsunoyama, Hiroki Akatsuka, Hiroki Sekiya, Tomomi Nagase, Atsushi Nakajima

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Advanced nanocluster ion source based on high-power impulse magnetron sputtering and time-resolved measurements of nanocluster formation'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds