Air pressure sensor for an insect wing

Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

Abstract

This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10 -3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.

Original languageEnglish
Article number4805510
Pages (from-to)825-828
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2009 Jun 1
Externally publishedYes
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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