Airflow shear stress sensor using side-wall doped piezoresistive plate

R. Kazama, H. Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.

Original languageEnglish
Title of host publication2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages710-713
Number of pages4
EditionFebruary
ISBN (Electronic)9781479979554
DOIs
Publication statusPublished - 2015 Feb 26
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
NumberFebruary
Volume2015-February
ISSN (Print)1084-6999

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/TerritoryPortugal
CityEstoril
Period15/1/1815/1/22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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