Airflow shear stress sensor using side-wall doped piezoresistive plate

R. Kazama; H. Takahashi; T. Takahata; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2015.7051056

Airflow shear stress sensor using side-wall doped piezoresistive plate

R. Kazama, H. Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	710-713
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051056
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2015.7051056

Cite this

Kazama, R., Takahashi, H., Takahata, T., Matsumoto, K., & Shimoyama, I. (2015). Airflow shear stress sensor using side-wall doped piezoresistive plate. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 710-713). [7051056] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051056

Airflow shear stress sensor using side-wall doped piezoresistive plate. / Kazama, R.; Takahashi, H.; Takahata, T. et al.

2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 710-713 7051056 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kazama, R, Takahashi, H, Takahata, T, Matsumoto, K & Shimoyama, I 2015, Airflow shear stress sensor using side-wall doped piezoresistive plate. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051056, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 710-713, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7051056

Kazama R, Takahashi H, Takahata T, Matsumoto K, Shimoyama I. Airflow shear stress sensor using side-wall doped piezoresistive plate. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 710-713. 7051056. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051056

Kazama, R. ; Takahashi, H. ; Takahata, T. et al. / Airflow shear stress sensor using side-wall doped piezoresistive plate. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 710-713 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

@inproceedings{3f3c8ec5981843a69f2849250ce902f9,

title = "Airflow shear stress sensor using side-wall doped piezoresistive plate",

abstract = "This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.",

author = "R. Kazama and H. Takahashi and T. Takahata and K. Matsumoto and I. Shimoyama",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

year = "2015",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2015.7051056",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "February",

pages = "710--713",

booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",

edition = "February",

}

TY - GEN

T1 - Airflow shear stress sensor using side-wall doped piezoresistive plate

AU - Kazama, R.

AU - Takahashi, H.

AU - Takahata, T.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2015/2/26

Y1 - 2015/2/26

N2 - This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.

AB - This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.

UR - http://www.scopus.com/inward/record.url?scp=84931086731&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84931086731&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2015.7051056

DO - 10.1109/MEMSYS.2015.7051056

M3 - Conference contribution

AN - SCOPUS:84931086731

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 710

EP - 713

BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

Y2 - 18 January 2015 through 22 January 2015

ER -

Airflow shear stress sensor using side-wall doped piezoresistive plate

Abstract

Publication series

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this