Abstract
This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.
| Original language | English |
|---|---|
| Article number | 7051056 |
| Pages (from-to) | 710-713 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Volume | 2015-February |
| Issue number | February |
| DOIs | |
| Publication status | Published - 2015 Feb 26 |
| Externally published | Yes |
| Event | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
Fingerprint Dive into the research topics of 'Airflow shear stress sensor using side-wall doped piezoresistive plate'. Together they form a unique fingerprint.
Cite this
Kazama, R., Takahashi, H., Takahata, T., Matsumoto, K., & Shimoyama, I. (2015). Airflow shear stress sensor using side-wall doped piezoresistive plate. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015-February(February), 710-713. [7051056]. https://doi.org/10.1109/MEMSYS.2015.7051056