Airflow shear stress sensor using side-wall doped piezoresistive plate

R. Kazama; H. Takahashi; T. Takahata; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2015.7051056

Airflow shear stress sensor using side-wall doped piezoresistive plate

R. Kazama, H. Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Contribution to journal › Conference article › peer-review

4 Citations (Scopus)

Abstract

This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.

Original language	English
Article number	7051056
Pages (from-to)	710-713
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2015-February
Issue number	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051056
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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Cite this

Airflow shear stress sensor using side-wall doped piezoresistive plate. / Kazama, R.; Takahashi, H.; Takahata, T.; Matsumoto, K.; Shimoyama, I.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7051056, 26.02.2015, p. 710-713.

Research output: Contribution to journal › Conference article › peer-review

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