TY - GEN
T1 - Airflow shear stress sensor using side-wall doped piezoresistive plate
AU - Kazama, R.
AU - Takahashi, H.
AU - Takahata, T.
AU - Matsumoto, K.
AU - Shimoyama, I.
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/2/26
Y1 - 2015/2/26
N2 - This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.
AB - This paper reports on a shear stress sensor for airflow. The sensor consists of a plate, side-wall doped beams and surrounding membrane with narrow gaps. The sensor plate was 300 μm×350 μm×3 μm in size. The plate was supported by the side-wall doped beams, which can detect their horizontal deformation. The sensor structure was designed not to disturb target airflow circumstance owing to its flat surface. The fabricated sensor was able to measure shear stress of laminar airflow with the resolution under 1.0 Pa.
UR - http://www.scopus.com/inward/record.url?scp=84931086731&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2015.7051056
DO - 10.1109/MEMSYS.2015.7051056
M3 - Conference contribution
AN - SCOPUS:84931086731
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 710
EP - 713
BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Y2 - 18 January 2015 through 22 January 2015
ER -