AlN cantilever for differential pressure sensor

Yutaka Tomimatsu; Hidetoshi Takahashi; Takeshi Kobayashi; Kiyoshi Matsumoto; Isao Shimoyama; Toshihiro Itoh; Ryutaro Maeda

doi:10.1109/ISAF.2013.6748705

AlN cantilever for differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

Department of Mechanical Engineering

Research output: Contribution to conference › Paper

Abstract

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

Original language	English
Pages	336-339
Number of pages	4
DOIs	https://doi.org/10.1109/ISAF.2013.6748705
Publication status	Published - 2013 Jan 1
Event	2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 - Prague 4, Czech Republic Duration: 2013 Jul 21 → 2013 Jul 25

Conference

Conference	2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013
Country	Czech Republic
City	Prague 4
Period	13/7/21 → 13/7/25

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Keywords

AlN
Differential pressure
Piezoelectri cantilever

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

Tomimatsu, Y., Takahashi, H., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). AlN cantilever for differential pressure sensor. 336-339. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic. https://doi.org/10.1109/ISAF.2013.6748705

AlN cantilever for differential pressure sensor. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi; Matsumoto, Kiyoshi; Shimoyama, Isao; Itoh, Toshihiro; Maeda, Ryutaro.

2013. 336-339 Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic.

Research output: Contribution to conference › Paper

Tomimatsu, Y, Takahashi, H, Kobayashi, T, Matsumoto, K, Shimoyama, I, Itoh, T & Maeda, R 2013, 'AlN cantilever for differential pressure sensor', Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic, 13/7/21 - 13/7/25 pp. 336-339. https://doi.org/10.1109/ISAF.2013.6748705

Tomimatsu, Yutaka ; Takahashi, Hidetoshi ; Kobayashi, Takeshi ; Matsumoto, Kiyoshi ; Shimoyama, Isao ; Itoh, Toshihiro ; Maeda, Ryutaro. / AlN cantilever for differential pressure sensor. Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic.4 p.

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Access to Document

10.1109/ISAF.2013.6748705