Abstract
The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa
| Original language | English |
|---|---|
| Pages | 336-339 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2013 Jan 1 |
| Externally published | Yes |
| Event | 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 - Prague 4, Czech Republic Duration: 2013 Jul 21 → 2013 Jul 25 |
Conference
| Conference | 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 |
|---|---|
| Country | Czech Republic |
| City | Prague 4 |
| Period | 13/7/21 → 13/7/25 |
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Keywords
- AlN
- Differential pressure
- Piezoelectri cantilever
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
AlN cantilever for differential pressure sensor. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi; Matsumoto, Kiyoshi; Shimoyama, Isao; Itoh, Toshihiro; Maeda, Ryutaro.
2013. 336-339 Paper presented at 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, Czech Republic.Research output: Contribution to conference › Paper
}
TY - CONF
T1 - AlN cantilever for differential pressure sensor
AU - Tomimatsu, Yutaka
AU - Takahashi, Hidetoshi
AU - Kobayashi, Takeshi
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
AU - Itoh, Toshihiro
AU - Maeda, Ryutaro
PY - 2013/1/1
Y1 - 2013/1/1
N2 - The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa
AB - The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa
KW - AlN
KW - Differential pressure
KW - Piezoelectri cantilever
UR - http://www.scopus.com/inward/record.url?scp=84896365307&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84896365307&partnerID=8YFLogxK
U2 - 10.1109/ISAF.2013.6748705
DO - 10.1109/ISAF.2013.6748705
M3 - Paper
AN - SCOPUS:84896365307
SP - 336
EP - 339
ER -