AlN cantilever for differential pressure sensor

Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'AlN cantilever for differential pressure sensor'. Together they form a unique fingerprint.

Engineering & Materials Science