Amorphization processes in ion implanted Si: Temperature dependence

Teruaki Motooka, Fumihiko Kobayashi, Paul Fons, Takashi Tokuyama, Nobuyoshi Natsuaki

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Fingerprint Dive into the research topics of 'Amorphization processes in ion implanted Si: Temperature dependence'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy