An AlN cantilever for a wake-up switch triggered by air pressure change

Y. Kaiho, H. Takahashi, Y. Tomimatsu, T. Kobayashi, K. Matsumoto, I. Shimoyama, T. Itoh, R. Maeda

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)

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Physics & Astronomy