An integrated micro fluxgate magnetic sensor

S. O. Choi, S. Kawahito, Y. Matsumoto, M. Ishida, Y. Tadokoro

Research output: Contribution to journalArticle

54 Citations (Scopus)

Abstract

This paper presents an integrated micro fluxgate magnetic sensor with planar fluxgate sensing elements and on-chip sensor interface circuits based on silicon integration technology. To simplify the integration process, we developed a noble sensing element with two-layer spiral coils and permalloy thin films at the top layer. The sensor interface circuits have been fabricated with the standard n-channel E/D (enhancement/ depletion) MOS process technology, and include the driver circuits for the periodic excitation of the core through the excitation coil and signal-processing circuits for the pick-up coil output based on second-harmonic detection. The fabricated planar sensing element has a magnetic sensitivity of about 73 V T-1 at 1 MHz excitation frequency and 150 mAp-p driver current. The magnetic sensitivity of the integrated fluxgate sensor is about 90 V T-1 at 610 kHz excitation frequency and 110 mAp-p driver current.

Original languageEnglish
Pages (from-to)121-126
Number of pages6
JournalSensors and Actuators, A: Physical
Volume55
Issue number2-3
DOIs
Publication statusPublished - 1996 Jul 31
Externally publishedYes

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Keywords

  • Fluxgates
  • Integrated sensors
  • Interface circuits
  • Magnetic sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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