An integrated micro fluxgate magnetic sensor

S. O. Choi, S. Kawahito, Yoshinori Matsumoto, M. Ishida, Y. Tadokoro

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

This paper presents an integrated micro fluxgate magnetic sensor with planar fluxgate sensing elements and on-chip sensor interface circuits based on silicon integration technology. To simplify the integration process, we developed a noble sensing element with two-layer spiral coils and permalloy thin films at the top layer. The sensor interface circuits have been fabricated with the standard n-channel E/D (enhancement/ depletion) MOS process technology, and include the driver circuits for the periodic excitation of the core through the excitation coil and signal-processing circuits for the pick-up coil output based on second-harmonic detection. The fabricated planar sensing element has a magnetic sensitivity of about 73 V T-1 at 1 MHz excitation frequency and 150 mAp-p driver current. The magnetic sensitivity of the integrated fluxgate sensor is about 90 V T-1 at 610 kHz excitation frequency and 110 mAp-p driver current.

Original languageEnglish
Pages (from-to)121-126
Number of pages6
JournalSensors and Actuators, A: Physical
Volume55
Issue number2-3
Publication statusPublished - 1996 Jul 31
Externally publishedYes

Fingerprint

Magnetic sensors
coils
Networks (circuits)
sensors
excitation
Sensors
sensitivity
Permalloys (trademark)
Silicon
signal processing
Signal processing
depletion
chips
harmonics
Thin films
augmentation
output
silicon
thin films

Keywords

  • Fluxgates
  • Integrated sensors
  • Interface circuits
  • Magnetic sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Choi, S. O., Kawahito, S., Matsumoto, Y., Ishida, M., & Tadokoro, Y. (1996). An integrated micro fluxgate magnetic sensor. Sensors and Actuators, A: Physical, 55(2-3), 121-126.

An integrated micro fluxgate magnetic sensor. / Choi, S. O.; Kawahito, S.; Matsumoto, Yoshinori; Ishida, M.; Tadokoro, Y.

In: Sensors and Actuators, A: Physical, Vol. 55, No. 2-3, 31.07.1996, p. 121-126.

Research output: Contribution to journalArticle

Choi, SO, Kawahito, S, Matsumoto, Y, Ishida, M & Tadokoro, Y 1996, 'An integrated micro fluxgate magnetic sensor', Sensors and Actuators, A: Physical, vol. 55, no. 2-3, pp. 121-126.
Choi SO, Kawahito S, Matsumoto Y, Ishida M, Tadokoro Y. An integrated micro fluxgate magnetic sensor. Sensors and Actuators, A: Physical. 1996 Jul 31;55(2-3):121-126.
Choi, S. O. ; Kawahito, S. ; Matsumoto, Yoshinori ; Ishida, M. ; Tadokoro, Y. / An integrated micro fluxgate magnetic sensor. In: Sensors and Actuators, A: Physical. 1996 ; Vol. 55, No. 2-3. pp. 121-126.
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