An integrated micro fluxgate magnetic sensor

S. O. Choi; S. Kawahito; Y. Matsumoto; M. Ishida; Y. Tadokoro

doi:10.1016/S0924-4247(97)80066-0

An integrated micro fluxgate magnetic sensor

S. O. Choi, S. Kawahito, Y. Matsumoto, M. Ishida, Y. Tadokoro

Research output: Contribution to journal › Article › peer-review

56 Citations (Scopus)

Abstract

This paper presents an integrated micro fluxgate magnetic sensor with planar fluxgate sensing elements and on-chip sensor interface circuits based on silicon integration technology. To simplify the integration process, we developed a noble sensing element with two-layer spiral coils and permalloy thin films at the top layer. The sensor interface circuits have been fabricated with the standard n-channel E/D (enhancement/ depletion) MOS process technology, and include the driver circuits for the periodic excitation of the core through the excitation coil and signal-processing circuits for the pick-up coil output based on second-harmonic detection. The fabricated planar sensing element has a magnetic sensitivity of about 73 V T^-1 at 1 MHz excitation frequency and 150 mA_p-p driver current. The magnetic sensitivity of the integrated fluxgate sensor is about 90 V T^-1 at 610 kHz excitation frequency and 110 mA_p-p driver current.

Original language	English
Pages (from-to)	121-126
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	55
Issue number	2-3
DOIs	https://doi.org/10.1016/S0924-4247(97)80066-0
Publication status	Published - 1996 Jul 31
Externally published	Yes

Keywords

Fluxgates
Integrated sensors
Interface circuits
Magnetic sensors

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/S0924-4247(97)80066-0

Cite this

@article{19466e9793454b1c83fa8f47b5dc86c3,

title = "An integrated micro fluxgate magnetic sensor",

abstract = "This paper presents an integrated micro fluxgate magnetic sensor with planar fluxgate sensing elements and on-chip sensor interface circuits based on silicon integration technology. To simplify the integration process, we developed a noble sensing element with two-layer spiral coils and permalloy thin films at the top layer. The sensor interface circuits have been fabricated with the standard n-channel E/D (enhancement/ depletion) MOS process technology, and include the driver circuits for the periodic excitation of the core through the excitation coil and signal-processing circuits for the pick-up coil output based on second-harmonic detection. The fabricated planar sensing element has a magnetic sensitivity of about 73 V T-1 at 1 MHz excitation frequency and 150 mAp-p driver current. The magnetic sensitivity of the integrated fluxgate sensor is about 90 V T-1 at 610 kHz excitation frequency and 110 mAp-p driver current.",

keywords = "Fluxgates, Integrated sensors, Interface circuits, Magnetic sensors",

author = "Choi, {S. O.} and S. Kawahito and Y. Matsumoto and M. Ishida and Y. Tadokoro",

note = "Funding Information: The authors would like to thank Mr M. Ashiki of Toyohashi University of Technology for his assistance in experiments. We also wish to thank Mr A. Takayama and Mr M. Tomita of Minebea Company for helpful discussions. This work is supported by the Ministry of Education, Science, and Culture of Japan under Grants-in-Aid for Young Scientists, No. 07750387.",

year = "1996",

month = jul,

day = "31",

doi = "10.1016/S0924-4247(97)80066-0",

language = "English",

volume = "55",

pages = "121--126",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "2-3",

}

TY - JOUR

T1 - An integrated micro fluxgate magnetic sensor

AU - Choi, S. O.

AU - Kawahito, S.

AU - Matsumoto, Y.

AU - Ishida, M.

AU - Tadokoro, Y.

N1 - Funding Information: The authors would like to thank Mr M. Ashiki of Toyohashi University of Technology for his assistance in experiments. We also wish to thank Mr A. Takayama and Mr M. Tomita of Minebea Company for helpful discussions. This work is supported by the Ministry of Education, Science, and Culture of Japan under Grants-in-Aid for Young Scientists, No. 07750387.

PY - 1996/7/31

Y1 - 1996/7/31

N2 - This paper presents an integrated micro fluxgate magnetic sensor with planar fluxgate sensing elements and on-chip sensor interface circuits based on silicon integration technology. To simplify the integration process, we developed a noble sensing element with two-layer spiral coils and permalloy thin films at the top layer. The sensor interface circuits have been fabricated with the standard n-channel E/D (enhancement/ depletion) MOS process technology, and include the driver circuits for the periodic excitation of the core through the excitation coil and signal-processing circuits for the pick-up coil output based on second-harmonic detection. The fabricated planar sensing element has a magnetic sensitivity of about 73 V T-1 at 1 MHz excitation frequency and 150 mAp-p driver current. The magnetic sensitivity of the integrated fluxgate sensor is about 90 V T-1 at 610 kHz excitation frequency and 110 mAp-p driver current.

AB - This paper presents an integrated micro fluxgate magnetic sensor with planar fluxgate sensing elements and on-chip sensor interface circuits based on silicon integration technology. To simplify the integration process, we developed a noble sensing element with two-layer spiral coils and permalloy thin films at the top layer. The sensor interface circuits have been fabricated with the standard n-channel E/D (enhancement/ depletion) MOS process technology, and include the driver circuits for the periodic excitation of the core through the excitation coil and signal-processing circuits for the pick-up coil output based on second-harmonic detection. The fabricated planar sensing element has a magnetic sensitivity of about 73 V T-1 at 1 MHz excitation frequency and 150 mAp-p driver current. The magnetic sensitivity of the integrated fluxgate sensor is about 90 V T-1 at 610 kHz excitation frequency and 110 mAp-p driver current.

KW - Fluxgates

KW - Integrated sensors

KW - Interface circuits

KW - Magnetic sensors

UR - http://www.scopus.com/inward/record.url?scp=0030182247&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030182247&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(97)80066-0

DO - 10.1016/S0924-4247(97)80066-0

M3 - Article

AN - SCOPUS:0030182247

SN - 0924-4247

VL - 55

SP - 121

EP - 126

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2-3

ER -

An integrated micro fluxgate magnetic sensor

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this