An integrated MOS magnetic sensor with chopper-stabilized amplifier

Shoji Kawahito, Kohji Hayakawa, Yoshinori Matsumoto, Mákoto Ishida, Yoshiaki Tadokoro

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

This paper describes an integrated MOS magnetic sensor with chopper-stabilized amplifier. The integrated magnetic sensor has been fabricated using the standard n-channel E/D(enhancement/depletion) MOS process technology. A sensing element with a dual-source dual-drain structure in the MOSFET suitable for the chopper driving has been developed, and is called split-source-drain MAGFET. A depletion-mode structure is used for the MAGFET to reduce the 1/f noise by applying a negative gate bias voltage. The integration of the chopper-stabilized amplifier with the silicon magnetic sensor leads to a reduction of the 1/f noise, the offset, and the offset drift of the amplifier, as well as to an enhancement of the equivalent sensitivity. The integrated magnetic sensor has a sensitivity of 5.5 V/T and the resolution of about 50 μT with 1 kHz bandwidth.

Original languageEnglish
Pages (from-to)1-12
Number of pages12
JournalSensors and Materials
Volume8
Issue number1
Publication statusPublished - 1996 Dec 1
Externally publishedYes

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Keywords

  • Chopper stabilization
  • Integrated sensor
  • Magnetic sensor
  • Split-source-drain MAGFET

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)

Cite this

Kawahito, S., Hayakawa, K., Matsumoto, Y., Ishida, M., & Tadokoro, Y. (1996). An integrated MOS magnetic sensor with chopper-stabilized amplifier. Sensors and Materials, 8(1), 1-12.