Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range

Hidekuni Takao; Yoshinori Matsumoto; Heedon Seo; Makoto Ishida; Tetsuro Nakamura

doi:10.1016/S0924-4247(97)80062-3

Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range

Hidekuni Takao, Yoshinori Matsumoto, Heedon Seo, Makoto Ishida, Tetsuro Nakamura

Research output: Contribution to journal › Article › peer-review

37 Citations (Scopus)

Abstract

The temperature and output characteristics of a three-dimensional vector accelerometer using silicon on insulator (SOI) structure are studied theoretically, and compared with experimental results. The temperature coefficients of sensitivity and offset voltage (TCS and TCO) are related to some factors such as thermal residual stress, and are expressed numerically. Thermal stress analysis of the accelerometer has also been carried out with the finite-element method (FEM) simulation program ANSYS, and the influence of the thermal stress on the TCO is estimated with the obtained expressions. Experimental results agree well with these theoretical results. Design considerations that enable the accelerometer to have desirable characteristics are discussed with reference to the expressions and the results of FEM simulation.

Original language	English
Pages (from-to)	91-97
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	55
Issue number	2-3
DOIs	https://doi.org/10.1016/S0924-4247(97)80062-3
Publication status	Published - 1996 Jul 31
Externally published	Yes

Keywords

3-D detection
Accelerometers
FEM simulation
SOI technology
Thermal residual stress

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/S0924-4247(97)80062-3

Cite this

@article{1c7127a08ba44db49c73331072a20c8e,

title = "Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range",

abstract = "The temperature and output characteristics of a three-dimensional vector accelerometer using silicon on insulator (SOI) structure are studied theoretically, and compared with experimental results. The temperature coefficients of sensitivity and offset voltage (TCS and TCO) are related to some factors such as thermal residual stress, and are expressed numerically. Thermal stress analysis of the accelerometer has also been carried out with the finite-element method (FEM) simulation program ANSYS, and the influence of the thermal stress on the TCO is estimated with the obtained expressions. Experimental results agree well with these theoretical results. Design considerations that enable the accelerometer to have desirable characteristics are discussed with reference to the expressions and the results of FEM simulation.",

keywords = "3-D detection, Accelerometers, FEM simulation, SOI technology, Thermal residual stress",

author = "Hidekuni Takao and Yoshinori Matsumoto and Heedon Seo and Makoto Ishida and Tetsuro Nakamura",

note = "Funding Information: This work was partly supported by the Japanese Ministry of Education, Science, Culture and Sports under a Grant-in-Aid for Developmental Scientific Research No.06555102.",

year = "1996",

month = jul,

day = "31",

doi = "10.1016/S0924-4247(97)80062-3",

language = "English",

volume = "55",

pages = "91--97",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "2-3",

}

TY - JOUR

T1 - Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range

AU - Takao, Hidekuni

AU - Matsumoto, Yoshinori

AU - Seo, Heedon

AU - Ishida, Makoto

AU - Nakamura, Tetsuro

N1 - Funding Information: This work was partly supported by the Japanese Ministry of Education, Science, Culture and Sports under a Grant-in-Aid for Developmental Scientific Research No.06555102.

PY - 1996/7/31

Y1 - 1996/7/31

N2 - The temperature and output characteristics of a three-dimensional vector accelerometer using silicon on insulator (SOI) structure are studied theoretically, and compared with experimental results. The temperature coefficients of sensitivity and offset voltage (TCS and TCO) are related to some factors such as thermal residual stress, and are expressed numerically. Thermal stress analysis of the accelerometer has also been carried out with the finite-element method (FEM) simulation program ANSYS, and the influence of the thermal stress on the TCO is estimated with the obtained expressions. Experimental results agree well with these theoretical results. Design considerations that enable the accelerometer to have desirable characteristics are discussed with reference to the expressions and the results of FEM simulation.

AB - The temperature and output characteristics of a three-dimensional vector accelerometer using silicon on insulator (SOI) structure are studied theoretically, and compared with experimental results. The temperature coefficients of sensitivity and offset voltage (TCS and TCO) are related to some factors such as thermal residual stress, and are expressed numerically. Thermal stress analysis of the accelerometer has also been carried out with the finite-element method (FEM) simulation program ANSYS, and the influence of the thermal stress on the TCO is estimated with the obtained expressions. Experimental results agree well with these theoretical results. Design considerations that enable the accelerometer to have desirable characteristics are discussed with reference to the expressions and the results of FEM simulation.

KW - 3-D detection

KW - Accelerometers

KW - FEM simulation

KW - SOI technology

KW - Thermal residual stress

UR - http://www.scopus.com/inward/record.url?scp=0030182427&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030182427&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(97)80062-3

DO - 10.1016/S0924-4247(97)80062-3

M3 - Article

AN - SCOPUS:0030182427

SN - 0924-4247

VL - 55

SP - 91

EP - 97

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2-3

ER -

Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range

Abstract

Keywords

ASJC Scopus subject areas

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