Analysis of rapid increase in the plasma density during the ramp-up phase in a radio frequency negative ion source by large-scale particle simulation

M. Yasumoto, M. Ohta, Y. Kawamura, Akiyoshi Hatayama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Numerical simulations become useful for the developing RF-ICP (Radio Frequency Inductively Coupled Plasma) negative ion sources. We are developing and parallelizing a two-dimensional three velocity electromagnetic Particle-In-Cell code. The result shows rapid increase in the electron density during the density ramp-up phase. A radial electric field due to the space charge is produced with increase in the electron density and the electron transport in the radial direction is suppressed. As a result, electrons stay for a long period in the region where the inductive electric field is strong, and this leads efficient electron acceleration and a rapid increasing of the electron density.

Original languageEnglish
Article number4858136
JournalReview of Scientific Instruments
Volume85
Issue number2
DOIs
Publication statusPublished - 2014 Feb

Fingerprint

Plasma density
Ion sources
ramps
negative ions
ion sources
plasma density
Carrier concentration
radio frequencies
Negative ions
Electric fields
electron acceleration
electric fields
Electrons
simulation
Inductively coupled plasma
guy wires
Electric space charge
space charge
electrons
Cells

ASJC Scopus subject areas

  • Instrumentation

Cite this

Analysis of rapid increase in the plasma density during the ramp-up phase in a radio frequency negative ion source by large-scale particle simulation. / Yasumoto, M.; Ohta, M.; Kawamura, Y.; Hatayama, Akiyoshi.

In: Review of Scientific Instruments, Vol. 85, No. 2, 4858136, 02.2014.

Research output: Contribution to journalArticle

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