Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film

Rihachiro Nakashima, Hidetoshi Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the fabrication method of an angular accelerometer with integrated liquid spiral channels and laser-induced graphene (LIG) sensing element. The proposed fabrication process forms the LIG sensing element and the spiral grooves via a CO2 laser and a UV laser, respectively, on a polyimide (PI) film. The liquid-sealed spiral channels are fabricated by filling the grooves with silicone oil and applying parylene deposition. Thus, the fabrication process is quite ple. The prototype sensor was validated for its response to angular acceleration.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherIEEE Computer Society
Pages747-749
Number of pages3
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 2022 Jan 92022 Jan 13

Publication series

NameIEEE Symposium on Mass Storage Systems and Technologies
Volume2022-January
ISSN (Print)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period22/1/922/1/13

Keywords

  • Angular accelerometer
  • LIG strain gauge
  • Liquid spiral channel
  • Parylene deposition

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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