Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films

Ayako Kimura, Masahiro Kawate, Hiroyuki Hasegawa, Tetsuya Suzuki

Research output: Contribution to journalArticlepeer-review

109 Citations (Scopus)

Abstract

Ti1-XAlXN and Cr1-XAlXN films were synthesized by the arc ion plating method differing in the second metal contents X and investigated on their crystal structures, lattice parameters and microstructures. X-ray diffraction patterns showed that crystal structures of both Ti1-XAl XN and Cr1-XAlXN films changed from the NaCl-type (cubic structure; c-) to wurtzite-type (hexagonal structure; h-) at Al contents X =0.6-0.7. Lattice parameters of c-Ti1-X AlXN and c-Cr1-XAlXN with Al contents X ≤0.6 uniformly decreased with respect to all lattice spacings with increasing X values. On the other hand, for h-Ti1-X AlXN and h-Cr1-XAlXN films with X ≥0.7, anisotropic lattice expansion and shrinkage were observed with the a- and c-axes. The lattice spacing expanded in the a-direction and shrank in the c-direction by adding Ti and Cr atoms with larger atomic radius into AlN structure, respectively.

Original languageEnglish
Pages (from-to)367-370
Number of pages4
JournalSurface and Coatings Technology
Volume169-170
DOIs
Publication statusPublished - 2003 Jun 2

Keywords

  • Aluminum nitride
  • Anisotropy
  • Lattice parameters
  • Phase transitions

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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