Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films

Ayako Kimura; Masahiro Kawate; Hiroyuki Hasegawa; Tetsuya Suzuki

doi:10.1016/S0257-8972(03)00040-9

Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films

Ayako Kimura, Masahiro Kawate, Hiroyuki Hasegawa, Tetsuya Suzuki

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

116 Citations (Scopus)

Abstract

Ti_1-XAl_XN and Cr_1-XAl_XN films were synthesized by the arc ion plating method differing in the second metal contents X and investigated on their crystal structures, lattice parameters and microstructures. X-ray diffraction patterns showed that crystal structures of both Ti_1-XAl _XN and Cr_1-XAl_XN films changed from the NaCl-type (cubic structure; c-) to wurtzite-type (hexagonal structure; h-) at Al contents X =0.6-0.7. Lattice parameters of c-Ti_1-X Al_XN and c-Cr_1-XAl_XN with Al contents X ≤0.6 uniformly decreased with respect to all lattice spacings with increasing X values. On the other hand, for h-Ti_1-X Al_XN and h-Cr_1-XAl_XN films with X ≥0.7, anisotropic lattice expansion and shrinkage were observed with the a- and c-axes. The lattice spacing expanded in the a-direction and shrank in the c-direction by adding Ti and Cr atoms with larger atomic radius into AlN structure, respectively.

Original language	English
Pages (from-to)	367-370
Number of pages	4
Journal	Surface and Coatings Technology
Volume	169-170
DOIs	https://doi.org/10.1016/S0257-8972(03)00040-9
Publication status	Published - 2003 Jun 2

Keywords

Aluminum nitride
Anisotropy
Lattice parameters
Phase transitions

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/S0257-8972(03)00040-9

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title = "Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films",

abstract = "Ti1-XAlXN and Cr1-XAlXN films were synthesized by the arc ion plating method differing in the second metal contents X and investigated on their crystal structures, lattice parameters and microstructures. X-ray diffraction patterns showed that crystal structures of both Ti1-XAl XN and Cr1-XAlXN films changed from the NaCl-type (cubic structure; c-) to wurtzite-type (hexagonal structure; h-) at Al contents X =0.6-0.7. Lattice parameters of c-Ti1-X AlXN and c-Cr1-XAlXN with Al contents X ≤0.6 uniformly decreased with respect to all lattice spacings with increasing X values. On the other hand, for h-Ti1-X AlXN and h-Cr1-XAlXN films with X ≥0.7, anisotropic lattice expansion and shrinkage were observed with the a- and c-axes. The lattice spacing expanded in the a-direction and shrank in the c-direction by adding Ti and Cr atoms with larger atomic radius into AlN structure, respectively.",

keywords = "Aluminum nitride, Anisotropy, Lattice parameters, Phase transitions",

author = "Ayako Kimura and Masahiro Kawate and Hiroyuki Hasegawa and Tetsuya Suzuki",

year = "2003",

month = jun,

day = "2",

doi = "10.1016/S0257-8972(03)00040-9",

language = "English",

volume = "169-170",

pages = "367--370",

journal = "Surface and Coatings Technology",

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TY - JOUR

T1 - Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films

AU - Kimura, Ayako

AU - Kawate, Masahiro

AU - Hasegawa, Hiroyuki

AU - Suzuki, Tetsuya

PY - 2003/6/2

Y1 - 2003/6/2

N2 - Ti1-XAlXN and Cr1-XAlXN films were synthesized by the arc ion plating method differing in the second metal contents X and investigated on their crystal structures, lattice parameters and microstructures. X-ray diffraction patterns showed that crystal structures of both Ti1-XAl XN and Cr1-XAlXN films changed from the NaCl-type (cubic structure; c-) to wurtzite-type (hexagonal structure; h-) at Al contents X =0.6-0.7. Lattice parameters of c-Ti1-X AlXN and c-Cr1-XAlXN with Al contents X ≤0.6 uniformly decreased with respect to all lattice spacings with increasing X values. On the other hand, for h-Ti1-X AlXN and h-Cr1-XAlXN films with X ≥0.7, anisotropic lattice expansion and shrinkage were observed with the a- and c-axes. The lattice spacing expanded in the a-direction and shrank in the c-direction by adding Ti and Cr atoms with larger atomic radius into AlN structure, respectively.

AB - Ti1-XAlXN and Cr1-XAlXN films were synthesized by the arc ion plating method differing in the second metal contents X and investigated on their crystal structures, lattice parameters and microstructures. X-ray diffraction patterns showed that crystal structures of both Ti1-XAl XN and Cr1-XAlXN films changed from the NaCl-type (cubic structure; c-) to wurtzite-type (hexagonal structure; h-) at Al contents X =0.6-0.7. Lattice parameters of c-Ti1-X AlXN and c-Cr1-XAlXN with Al contents X ≤0.6 uniformly decreased with respect to all lattice spacings with increasing X values. On the other hand, for h-Ti1-X AlXN and h-Cr1-XAlXN films with X ≥0.7, anisotropic lattice expansion and shrinkage were observed with the a- and c-axes. The lattice spacing expanded in the a-direction and shrank in the c-direction by adding Ti and Cr atoms with larger atomic radius into AlN structure, respectively.

KW - Aluminum nitride

KW - Anisotropy

KW - Lattice parameters

KW - Phase transitions

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VL - 169-170

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JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films

Abstract

Keywords

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