Anomalous electron mobility in Extremely-Thin SOI (ETSOI) diffusion layers with SOI thickness of less than 10 nm and high doping concentration of greater than 1×1018cm-3

Naotoshi Kadotani, Tsunaki Takahashi, Kunro Chen, Tetsuo Kodera, Shunri Oda, Ken Uchida

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    4 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Anomalous electron mobility in Extremely-Thin SOI (ETSOI) diffusion layers with SOI thickness of less than 10 nm and high doping concentration of greater than 1×1018cm-3'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Chemical Compounds

    Physics & Astronomy