Applications of Nano and Micromachining in Industry

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)
Original languageEnglish
Title of host publicationNano and Micromachining
PublisherJohn Wiley and Sons
Pages175-207
Number of pages33
ISBN (Print)9781848211032
DOIs
Publication statusPublished - 2010 Jan 26

Keywords

  • High accuracy components
  • Liquid crystal display
  • Manufacturing industries
  • Optoelectronic components
  • Semiconductor substrates

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yan, J. (2010). Applications of Nano and Micromachining in Industry. In Nano and Micromachining (pp. 175-207). John Wiley and Sons. https://doi.org/10.1002/9780470611807.ch8