Applications of Nano and Micromachining in Industry

Jiwang Yan

doi:10.1002/9780470611807.ch8

Applications of Nano and Micromachining in Industry

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Nano and Micromachining
Publisher	John Wiley and Sons
Pages	175-207
Number of pages	33
ISBN (Print)	9781848211032
DOIs	https://doi.org/10.1002/9780470611807.ch8
Publication status	Published - 2010 Jan 26
Externally published	Yes

Keywords

High accuracy components
Liquid crystal display
Manufacturing industries
Optoelectronic components
Semiconductor substrates

ASJC Scopus subject areas

Engineering(all)

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10.1002/9780470611807.ch8

Cite this

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title = "Applications of Nano and Micromachining in Industry",

keywords = "High accuracy components, Liquid crystal display, Manufacturing industries, Optoelectronic components, Semiconductor substrates",

author = "Jiwang Yan",

year = "2010",

month = jan,

day = "26",

doi = "10.1002/9780470611807.ch8",

language = "English",

isbn = "9781848211032",

pages = "175--207",

booktitle = "Nano and Micromachining",

publisher = "John Wiley and Sons",

}

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T1 - Applications of Nano and Micromachining in Industry

AU - Yan, Jiwang

PY - 2010/1/26

Y1 - 2010/1/26

KW - High accuracy components

KW - Liquid crystal display

KW - Manufacturing industries

KW - Optoelectronic components

KW - Semiconductor substrates

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M3 - Chapter

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SP - 175

EP - 207

BT - Nano and Micromachining

PB - John Wiley and Sons

ER -

Applications of Nano and Micromachining in Industry

Keywords

ASJC Scopus subject areas

Access to Document

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Cite this