Artificial tactile feeling displayed by large displacement MEMS actuator arrays

J. Watanabe, H. Ishikawa, X. Arouette, Y. Matsumoto, N. Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

We demonstrate display of artificial tactile feeling using large displacement MEMS actuator arrays. Each actuator consists of a piezoelectric actuator and hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible liquid in a micro-chamber with two flexible polymer membranes. In prior work, we experimentally applied the actuator arrays to an efficient vibrational Braille code display. In this paper, we investigated the artificial tactile feeling projected onto the fingertip in contact with the display while the actuation pattern was controlled both temporally and spatially. The arrays could successfully display "rough" and "smooth" tactile feeling distinctly when the vibrational frequency of the individual actuator and switching time of the lines of actuators were controlled.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages1129-1132
Number of pages4
DOIs
Publication statusPublished - 2012 May 7
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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