Artificial tactile feeling displayed by large displacement MEMS actuator arrays

J. Watanabe, H. Ishikawa, X. Arouette, Yoshinori Matsumoto, Norihisa Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

We demonstrate display of artificial tactile feeling using large displacement MEMS actuator arrays. Each actuator consists of a piezoelectric actuator and hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible liquid in a micro-chamber with two flexible polymer membranes. In prior work, we experimentally applied the actuator arrays to an efficient vibrational Braille code display. In this paper, we investigated the artificial tactile feeling projected onto the fingertip in contact with the display while the actuation pattern was controlled both temporally and spatially. The arrays could successfully display "rough" and "smooth" tactile feeling distinctly when the vibrational frequency of the individual actuator and switching time of the lines of actuators were controlled.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages1129-1132
Number of pages4
DOIs
Publication statusPublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

Fingerprint

sensory feedback
microelectromechanical systems
MEMS
Actuators
actuators
Display devices
braille
piezoelectric actuators
Piezoelectric actuators
Vibrational spectra
actuation
hydraulics
Amplification
Polymers
chambers
Hydraulics
membranes
Membranes
polymers
Liquids

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Watanabe, J., Ishikawa, H., Arouette, X., Matsumoto, Y., & Miki, N. (2012). Artificial tactile feeling displayed by large displacement MEMS actuator arrays. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1129-1132). [6170361] https://doi.org/10.1109/MEMSYS.2012.6170361

Artificial tactile feeling displayed by large displacement MEMS actuator arrays. / Watanabe, J.; Ishikawa, H.; Arouette, X.; Matsumoto, Yoshinori; Miki, Norihisa.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. p. 1129-1132 6170361.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Watanabe, J, Ishikawa, H, Arouette, X, Matsumoto, Y & Miki, N 2012, Artificial tactile feeling displayed by large displacement MEMS actuator arrays. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 6170361, pp. 1129-1132, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170361
Watanabe J, Ishikawa H, Arouette X, Matsumoto Y, Miki N. Artificial tactile feeling displayed by large displacement MEMS actuator arrays. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. p. 1129-1132. 6170361 https://doi.org/10.1109/MEMSYS.2012.6170361
Watanabe, J. ; Ishikawa, H. ; Arouette, X. ; Matsumoto, Yoshinori ; Miki, Norihisa. / Artificial tactile feeling displayed by large displacement MEMS actuator arrays. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. pp. 1129-1132
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