Artificial tactile feeling displayed by large displacement MEMS actuator arrays

J. Watanabe; H. Ishikawa; X. Arouette; Y. Matsumoto; N. Miki

doi:10.1109/MEMSYS.2012.6170361

Artificial tactile feeling displayed by large displacement MEMS actuator arrays

J. Watanabe, H. Ishikawa, X. Arouette, Y. Matsumoto, N. Miki

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Citations (Scopus)

Abstract

We demonstrate display of artificial tactile feeling using large displacement MEMS actuator arrays. Each actuator consists of a piezoelectric actuator and hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible liquid in a micro-chamber with two flexible polymer membranes. In prior work, we experimentally applied the actuator arrays to an efficient vibrational Braille code display. In this paper, we investigated the artificial tactile feeling projected onto the fingertip in contact with the display while the actuation pattern was controlled both temporally and spatially. The arrays could successfully display "rough" and "smooth" tactile feeling distinctly when the vibrational frequency of the individual actuator and switching time of the lines of actuators were controlled.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1129-1132
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170361
Publication status	Published - 2012 May 7
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 2012 Jan 29 → 2012 Feb 2

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	12/1/29 → 12/2/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2012.6170361

Cite this

Watanabe, J., Ishikawa, H., Arouette, X., Matsumoto, Y., & Miki, N. (2012). Artificial tactile feeling displayed by large displacement MEMS actuator arrays. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1129-1132). [6170361] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170361

Artificial tactile feeling displayed by large displacement MEMS actuator arrays. / Watanabe, J.; Ishikawa, H.; Arouette, X. et al.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1129-1132 6170361 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Watanabe, J, Ishikawa, H, Arouette, X, Matsumoto, Y & Miki, N 2012, Artificial tactile feeling displayed by large displacement MEMS actuator arrays. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170361, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1129-1132, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170361

Watanabe J, Ishikawa H, Arouette X, Matsumoto Y , Miki N. Artificial tactile feeling displayed by large displacement MEMS actuator arrays. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1129-1132. 6170361. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170361

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Artificial tactile feeling displayed by large displacement MEMS actuator arrays

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