Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation

Jiwang Yan; Fuminori Kobayashi; Momoji Kubo; Tsunemoto Kuriyagawa

Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation

Jiwang Yan, Fuminori Kobayashi, Momoji Kubo, Tsunemoto Kuriyagawa

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.

Original language	English
Title of host publication	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Editors	H. Spaan, Theresa Burke, Paul Shore
Publisher	euspen
Pages	372-376
Number of pages	5
ISBN (Electronic)	9780956679000
Publication status	Published - 2012 Jan 1
Event	12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden Duration: 2012 Jun 4 → 2012 Jun 7

Publication series

Name	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Volume	2

Other

Other	12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Country/Territory	Sweden
City	Stockholm
Period	12/6/4 → 12/6/7

ASJC Scopus subject areas

Industrial and Manufacturing Engineering
Mechanical Engineering
Instrumentation
Environmental Engineering
Materials Science(all)

Cite this

Yan, J., Kobayashi, F., Kubo, M., & Kuriyagawa, T. (2012). Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. In H. Spaan, T. Burke, & P. Shore (Eds.), Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 (pp. 372-376). (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 2). euspen.

Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. / Yan, Jiwang; Kobayashi, Fuminori; Kubo, Momoji et al.
Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. ed. / H. Spaan; Theresa Burke; Paul Shore. euspen, 2012. p. 372-376 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yan, J, Kobayashi, F, Kubo, M & Kuriyagawa, T 2012, Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. in H Spaan, T Burke & P Shore (eds), Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, vol. 2, euspen, pp. 372-376, 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, Stockholm, Sweden, 12/6/4.

Yan J, Kobayashi F, Kubo M, Kuriyagawa T. Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. In Spaan H, Burke T, Shore P, editors, Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. euspen. 2012. p. 372-376. (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012).

Yan, Jiwang ; Kobayashi, Fuminori ; Kubo, Momoji et al. / Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation. Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. editor / H. Spaan ; Theresa Burke ; Paul Shore. euspen, 2012. pp. 372-376 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012).

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Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation

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