Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation

Jiwang Yan, Fuminori Kobayashi, Momoji Kubo, Tsunemoto Kuriyagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.

Original languageEnglish
Title of host publicationProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
EditorsH. Spaan, Theresa Burke, Paul Shore
Publishereuspen
Pages372-376
Number of pages5
ISBN (Electronic)9780956679000
Publication statusPublished - 2012 Jan 1
Event12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden
Duration: 2012 Jun 42012 Jun 7

Publication series

NameProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Volume2

Other

Other12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
CountrySweden
CityStockholm
Period12/6/412/6/7

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering
  • Materials Science(all)

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