Automatic film formation system for ultra-thin organic/inorganic hetero-structure by mass-controlled layer-by-layer sequential adsorption method with 'nm' scale accuracy

Seimei S. Shiratori, Takahiro Ito, Takeshi Yamada

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science