Barometric pressure change measurement

N. Minh-Dung, H. Takahashi, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

In this paper, we report a high-sensitivity barometric pressure sensor for use in automotive navigation, personal mobile systems and environmental monitoring. The sensor consisted of an open cavity and a micro piezo-resistive cantilever, which is placed at the cavity's opening. In the proposed structure, the cavity did not need to be vacuum-sealed and the air-gap between the cantilever and its surrounding walls was micrometer order size. The cantilever was used to detect the time-variant interaction between barometric pressure and the pressure inside the cavity. Evaluation experiments demonstrate that the sensor is able to measure the barometric pressure change with high sensitivity, with expected resolution of 0.1 Pa.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages898-901
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

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Keywords

  • Pressure sensor
  • air leakage
  • barometric pressure
  • open cavity
  • piezo-resistive cantilever

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Minh-Dung, N., Takahashi, H., Matsumoto, K., & Shimoyama, I. (2011). Barometric pressure change measurement. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 898-901). [5969212] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969212