Basic performance analysis of ER gel in vacuum

Y. Shida, Y. Kakinuma, T. Aoyama, H. Minami, H. Anzai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Electro-rheological gel (ER gel) exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the electro-adhesive effect (EA effect). The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally analyze the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.

Original languageEnglish
Title of host publicationElectro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference
PublisherWorld Scientific Publishing Co. Pte Ltd
Pages81-87
Number of pages7
ISBN (Print)9814340227, 9789814340229
DOIs
Publication statusPublished - 2011 Jan 1
Event12th International Conference on Electrorheological Fluids and Magnetorheological Suspensions, ERMR 2010 - Philadelphia, PA, United States
Duration: 2010 Aug 162010 Aug 20

Publication series

NameElectro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference

Other

Other12th International Conference on Electrorheological Fluids and Magnetorheological Suspensions, ERMR 2010
CountryUnited States
CityPhiladelphia, PA
Period10/8/1610/8/20

ASJC Scopus subject areas

  • Fluid Flow and Transfer Processes

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  • Cite this

    Shida, Y., Kakinuma, Y., Aoyama, T., Minami, H., & Anzai, H. (2011). Basic performance analysis of ER gel in vacuum. In Electro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference (pp. 81-87). (Electro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference). World Scientific Publishing Co. Pte Ltd. https://doi.org/10.1142/9789814340236_0011