Basic performance evaluation of electrorheological gel in vacuum condition

Y. Shida, Yasuhiro Kakinuma, Tojiro Aoyama, H. Minami, H. Anzai

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

ER gel exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the EA effect. The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally evaluate the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.

Original languageEnglish
Pages (from-to)1699-1705
Number of pages7
JournalJournal of Intelligent Material Systems and Structures
Volume22
Issue number15
DOIs
Publication statusPublished - 2011 Oct

Fingerprint

Gels
Vacuum
Degassing
Silicon wafers
Shearing
Adhesives
Damping
Electric fields

Keywords

  • actuator
  • Electrorheological
  • polymers

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanical Engineering

Cite this

Basic performance evaluation of electrorheological gel in vacuum condition. / Shida, Y.; Kakinuma, Yasuhiro; Aoyama, Tojiro; Minami, H.; Anzai, H.

In: Journal of Intelligent Material Systems and Structures, Vol. 22, No. 15, 10.2011, p. 1699-1705.

Research output: Contribution to journalArticle

@article{6919b7ae4ce7461c8061b3e994f1625b,
title = "Basic performance evaluation of electrorheological gel in vacuum condition",
abstract = "ER gel exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the EA effect. The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally evaluate the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.",
keywords = "actuator, Electrorheological, polymers",
author = "Y. Shida and Yasuhiro Kakinuma and Tojiro Aoyama and H. Minami and H. Anzai",
year = "2011",
month = "10",
doi = "10.1177/1045389X11421817",
language = "English",
volume = "22",
pages = "1699--1705",
journal = "Journal of Intelligent Material Systems and Structures",
issn = "1045-389X",
publisher = "SAGE Publications Ltd",
number = "15",

}

TY - JOUR

T1 - Basic performance evaluation of electrorheological gel in vacuum condition

AU - Shida, Y.

AU - Kakinuma, Yasuhiro

AU - Aoyama, Tojiro

AU - Minami, H.

AU - Anzai, H.

PY - 2011/10

Y1 - 2011/10

N2 - ER gel exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the EA effect. The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally evaluate the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.

AB - ER gel exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the EA effect. The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally evaluate the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.

KW - actuator

KW - Electrorheological

KW - polymers

UR - http://www.scopus.com/inward/record.url?scp=82955217766&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=82955217766&partnerID=8YFLogxK

U2 - 10.1177/1045389X11421817

DO - 10.1177/1045389X11421817

M3 - Article

AN - SCOPUS:82955217766

VL - 22

SP - 1699

EP - 1705

JO - Journal of Intelligent Material Systems and Structures

JF - Journal of Intelligent Material Systems and Structures

SN - 1045-389X

IS - 15

ER -