Basic performance evaluation of electrorheological gel in vacuum condition

Y. Shida, Y. Kakinuma, T. Aoyama, H. Minami, H. Anzai

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

ER gel exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the EA effect. The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally evaluate the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.

Original languageEnglish
Pages (from-to)1699-1705
Number of pages7
JournalJournal of Intelligent Material Systems and Structures
Volume22
Issue number15
DOIs
Publication statusPublished - 2011 Oct 1

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Keywords

  • Electrorheological
  • actuator
  • polymers

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanical Engineering

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