Beam cleanup by stimulated Brillouin scattering phase conjugation for a KrF laser at high repetition rate

T. Yagi, H. Saito, T. Fujioka, K. Ohta, T. Arai, M. Obara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A stimulated Brillouin scattering (SBS) phase conjugation with a KrF amplifier is used to obtain the high-pointing stability and small beam divergence necessary for precision micromachining. The goal is to achieve a beam divergence 1.5 times the diffraction limit, 0.1 cm-1 of a bandwidth, and the high-pointing stability at a pulse rate of 1-kHz. An experimental scheme that provided preliminary results of beam cleanup by SBS phase conjugation up to 100 Hz of the pulse rate is described. The method used to analyze the spectrum distribution in the beam cross section is presented, and examples of the Fabry-Perot fringes and calculated shift (in wavenumber) mapped onto the beam cross section are show. This example indicates that the spectrum in the band-narrowed KrF laser can be nonuniform, and it can cause poor reflectance in the phase conjugation. Calculation of the energy distribution associated with the narrowband and broadband portions showed that the narrowband seed beam contained a considerable amount of the broadband component, which is mostly distributed in the outer part of the beam.

Original languageEnglish
Title of host publicationCONFERENCE ON LASERS AND ELECTRO-0PTICS
Editors Anon
PublisherPubl by IEEE
Pages340, 342-340, 343
ISBN (Print)1557520860
Publication statusPublished - 1989 Dec 1
EventSummaries of Papers Presented at the Conference on Lasers and Electro-Optics - Baltimore, MD, USA
Duration: 1989 Apr 241989 Apr 28

Publication series

NameCONFERENCE ON LASERS AND ELECTRO-0PTICS

Other

OtherSummaries of Papers Presented at the Conference on Lasers and Electro-Optics
CityBaltimore, MD, USA
Period89/4/2489/4/28

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Yagi, T., Saito, H., Fujioka, T., Ohta, K., Arai, T., & Obara, M. (1989). Beam cleanup by stimulated Brillouin scattering phase conjugation for a KrF laser at high repetition rate. In Anon (Ed.), CONFERENCE ON LASERS AND ELECTRO-0PTICS (pp. 340, 342-340, 343). (CONFERENCE ON LASERS AND ELECTRO-0PTICS). Publ by IEEE.