Biaxial angular acceleration sensor with rotational- symmetric spiral channels and MEMS piezoresistive cantilevers

Rihachiro Nakashima, Hidetoshi Takahashi

Research output: Contribution to journalArticlepeer-review

Abstract

Angular acceleration sensors are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotationalsymmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10-5/(rad/s2), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk.

Original languageEnglish
Article number507
JournalMicromachines
Volume12
Issue number5
DOIs
Publication statusPublished - 2021

Keywords

  • Angular acceleration sensor
  • Differential pressure sensor
  • Piezoresistive cantilever
  • Spiral channel

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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