Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

H. Onoe, M. Gel, K. Hoshino, K. Matsumoto, I. Shimoyama

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

This paper describes binding force measurement using force-sensing piezoresistive cantilevers, to evaluate binding between micro-scale SiO 2 flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals' interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro-scale flat surfaces.

Original languageEnglish
Pages (from-to)16-19
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005 Oct 25
Externally publishedYes
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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