Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

Hiroaki Onoe, M. Gel, K. Hoshino, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper describes binding force measurement using force-sensing piezoresistive cantilevers, to evaluate binding between micro-scale SiO 2 flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals' interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro-scale flat surfaces.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages16-19
Number of pages4
Publication statusPublished - 2005
Externally publishedYes
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period05/1/3005/2/3

Fingerprint

Force measurement
Fluidics
Colloids
Self assembly
Particles (particulate matter)
Substrates

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Onoe, H., Gel, M., Hoshino, K., Matsumoto, K., & Shimoyama, I. (2005). Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 16-19)

Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers. / Onoe, Hiroaki; Gel, M.; Hoshino, K.; Matsumoto, K.; Shimoyama, I.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 16-19.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Onoe, H, Gel, M, Hoshino, K, Matsumoto, K & Shimoyama, I 2005, Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). pp. 16-19, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, Miami Beach, FL, United States, 05/1/30.
Onoe H, Gel M, Hoshino K, Matsumoto K, Shimoyama I. Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 16-19
Onoe, Hiroaki ; Gel, M. ; Hoshino, K. ; Matsumoto, K. ; Shimoyama, I. / Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. pp. 16-19
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