Cantilever with 10-fold tunable spring constant using Lorentz force

W. Ohnishi, Hidetoshi Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports a cantilever with 10-fold tunable spring constant. The spring constant can be tuned both larger and smaller using Lorentz force generated by direct current which flows through the wiring on the cantilever. We designed the cantilever so that the maximum spring constant change by Lorentz force can be the same order as initial spring constant. The change of the spring constant was evaluated from the resonant frequency shift. The experimental result shows that the resonant frequency can be controlled from 1.1 kHz to 3.8 kHz, and the ratio of the tuned spring constant to the initial value was evaluated to be from 0.22 to 2.6.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages866-868
Number of pages3
ISBN (Electronic)9781509019731
DOIs
Publication statusPublished - 2016 Feb 26
Externally publishedYes
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 2016 Jan 242016 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period16/1/2416/1/28

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Ohnishi, W., Takahashi, H., Takahata, T., Matsumoto, K., & Shimoyama, I. (2016). Cantilever with 10-fold tunable spring constant using Lorentz force. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 866-868). [7421767] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421767