Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.

Original languageEnglish
Article number07
Pages (from-to)37-44
Number of pages8
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume5732
DOIs
Publication statusPublished - 2005 Jul 21
Externally publishedYes
EventQuantum Sensing and Nanophotonic Devices II - San Jose, CA, United States
Duration: 2005 Jan 232005 Jan 27

Keywords

  • Carbon nanotube
  • Chemical Vapor Deposition
  • LSI interconnect
  • Via

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

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