Carbon nanotube technologies for future ULSI via interconnects

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.

Original languageEnglish
Title of host publicationProgress in Biomedical Optics and Imaging - Proceedings of SPIE
EditorsM. Razeghi, G.J. Brown
Pages37-44
Number of pages8
Volume5732
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventQuantum Sensing and Nanophotonic Devices II - San Jose, CA, United States
Duration: 2005 Jan 232005 Jan 27

Other

OtherQuantum Sensing and Nanophotonic Devices II
CountryUnited States
CitySan Jose, CA
Period05/1/2305/1/27

Fingerprint

Carbon nanotubes

Keywords

  • Carbon nanotube
  • Chemical Vapor Deposition
  • LSI interconnect
  • Via

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Awano, Y. (2005). Carbon nanotube technologies for future ULSI via interconnects. In M. Razeghi, & G. J. Brown (Eds.), Progress in Biomedical Optics and Imaging - Proceedings of SPIE (Vol. 5732, pp. 37-44). [07] https://doi.org/10.1117/12.580083

Carbon nanotube technologies for future ULSI via interconnects. / Awano, Yuji.

Progress in Biomedical Optics and Imaging - Proceedings of SPIE. ed. / M. Razeghi; G.J. Brown. Vol. 5732 2005. p. 37-44 07.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Awano, Y 2005, Carbon nanotube technologies for future ULSI via interconnects. in M Razeghi & GJ Brown (eds), Progress in Biomedical Optics and Imaging - Proceedings of SPIE. vol. 5732, 07, pp. 37-44, Quantum Sensing and Nanophotonic Devices II, San Jose, CA, United States, 05/1/23. https://doi.org/10.1117/12.580083
Awano Y. Carbon nanotube technologies for future ULSI via interconnects. In Razeghi M, Brown GJ, editors, Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Vol. 5732. 2005. p. 37-44. 07 https://doi.org/10.1117/12.580083
Awano, Yuji. / Carbon nanotube technologies for future ULSI via interconnects. Progress in Biomedical Optics and Imaging - Proceedings of SPIE. editor / M. Razeghi ; G.J. Brown. Vol. 5732 2005. pp. 37-44
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