Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano

doi:10.1117/12.580083

Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.

Original language	English
Article number	07
Pages (from-to)	37-44
Number of pages	8
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	5732
DOIs	https://doi.org/10.1117/12.580083
Publication status	Published - 2005 Jul 21
Externally published	Yes
Event	Quantum Sensing and Nanophotonic Devices II - San Jose, CA, United States Duration: 2005 Jan 23 → 2005 Jan 27

Keywords

Carbon nanotube
Chemical Vapor Deposition
LSI interconnect
Via

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biomaterials
Atomic and Molecular Physics, and Optics
Radiology Nuclear Medicine and imaging

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10.1117/12.580083

Cite this

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Carbon nanotube technologies for future ULSI via interconnects

Abstract

Keywords

ASJC Scopus subject areas

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