Carbon nanotube via interconnect technologies: Size-classified catalyst nanoparticles and low-resistance ohmic contact formation

Y. Awano, S. Sato, D. Kondo, M. Ohfuti, A. Kawabata, M. Nihei, N. Yokoyama

Research output: Contribution to journalArticlepeer-review

77 Citations (Scopus)

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Engineering & Materials Science

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