Carbon nanotube via interconnect technologies: Size-classified catalyst nanoparticles and low-resistance ohmic contact formation

Engineering & Materials Science

• Ohmic contacts 100%
• Carbon nanotubes 69%
• Nanoparticles 65%
• Catalysts 56%
• Nucleation 46%
• Amorphous carbon 33%
• Molecular dynamics 24%
• Electric wiring 23%
• Oxidation 19%

Physics & Astronomy

• low resistance 75%
• catalysts 61%
• electric contacts 58%
• carbon nanotubes 57%
• nucleation 19%
• impactors 17%
• wiring 16%
• large scale integration 16%
• oxidation 9%
• molecular dynamics 9%
• carbon 8%

Chemical Compounds

• Nucleation 54%
• Carbon Nanotube 48%
• Resistance 41%
• Nanoparticle 33%
• Carbon Atom 31%
• Catalyst 27%
• Molecular Dynamics 24%
• Amorphous Material 22%
• Oxidation Reaction 14%